Abstract:
Described herein are methods and systems for providing a user interface to indicate health of a tool in a manufacturing facility. A method may include receiving, via a user interface, user selection of fault detection data pertaining to a tool in a manufacturing facility, obtaining health abnormality indicators of the tool using the fault detection data, and presenting the health abnormality indicators of the tool in the user interface.
Abstract:
Techniques are disclosed for methods and apparatuses for forming for determining when to perform maintenance events. The technique comprises determining a first cost of false positives and a second cost of missed true positives. A Receive Operating Characteristic (ROC) of a prediction model is determined for the occurrence of an event. A survival function and prediction horizon is generated from the prediction model for the occurrence of an event. The operational area on the ROC is determined based on the first costs and second costs. A threshold is determined from the ROC and is applied to the survival function and prediction horizon. A maintenance event is triggered based on the threshold.
Abstract:
Described herein are methods and systems for providing a user interface to indicate health of a tool in a manufacturing facility. A method may include receiving, via a user interface, user selection of fault detection data pertaining to a tool in a manufacturing facility, obtaining health abnormality indicators of the tool using the fault detection data, and presenting the health abnormality indicators of the tool in the user interface.