公开(公告)号：US20140114611A1

公开(公告)日：2014-04-24

申请号：US14061725

申请日：2013-10-23

Applicant: Applied Materials, Inc.

Inventor： James R. Moyne ,  Jimmy Iskandar ,  Bradley D. Schulze

IPC: G01M99/00

CPC classification number: G05B23/0272 ,  G05B19/4184 ,  G05B23/024 ,  Y02P90/14

Abstract: Described herein are methods and systems for providing a user interface to indicate health of a tool in a manufacturing facility. A method may include receiving, via a user interface, user selection of fault detection data pertaining to a tool in a manufacturing facility, obtaining health abnormality indicators of the tool using the fault detection data, and presenting the health abnormality indicators of the tool in the user interface.

Abstract translation: 这里描述了用于提供用户界面以指示制造设施中的工具的健康的方法和系统。 一种方法可以包括：经由用户界面接收用户选择与制造设备中的工具相关的故障检测数据，使用故障检测数据获取所述工具的健康异常指示，以及将所述工具的健康异常指示符呈现在 用户界面。

公开(公告)号：US09582828B2

公开(公告)日：2017-02-28

申请号：US14341464

申请日：2014-07-25

Applicant: Applied Materials, Inc.

Inventor： James R. Moyne

IPC: G06F9/44 ,  G06N7/02 ,  G06N7/06 ,  G06Q40/00

CPC classification number: G05B23/0243 ,  G06N7/005 ,  G06Q40/00

Abstract: Techniques are disclosed for methods and apparatuses for forming for determining when to perform maintenance events. The technique comprises determining a first cost of false positives and a second cost of missed true positives. A Receive Operating Characteristic (ROC) of a prediction model is determined for the occurrence of an event. A survival function and prediction horizon is generated from the prediction model for the occurrence of an event. The operational area on the ROC is determined based on the first costs and second costs. A threshold is determined from the ROC and is applied to the survival function and prediction horizon. A maintenance event is triggered based on the threshold.

Abstract translation: 公开了用于形成用于确定何时执行维护事件的方法和装置的技术。 该技术包括确定误报的第一成本和错过的真阳性的第二次成本。 确定事件发生的预测模型的接收操作特性（ROC）。 从事件发生的预测模型生成生存函数和预测水平。 中华民国的业务领域是根据第一笔费用和第二笔费用确定的。 阈值由ROC确定，并应用于生存函数和预测范围。 基于阈值触发维护事件。

公开(公告)号：US10042357B2

公开(公告)日：2018-08-07

申请号：US14061725

申请日：2013-10-23

Applicant: Applied Materials, Inc.

Inventor： James R. Moyne ,  Jimmy Iskandar ,  Bradley D. Schulze

IPC: G06F11/30 ,  G21C17/00 ,  G05B23/02 ,  G05B19/418

Abstract: Described herein are methods and systems for providing a user interface to indicate health of a tool in a manufacturing facility. A method may include receiving, via a user interface, user selection of fault detection data pertaining to a tool in a manufacturing facility, obtaining health abnormality indicators of the tool using the fault detection data, and presenting the health abnormality indicators of the tool in the user interface.