公开(公告)号：US10763154B2

公开(公告)日：2020-09-01

申请号：US16114558

申请日：2018-08-28

Applicant: Applied Materials, Inc.

Inventor： Ying Ma ,  Yixi Tian ,  Shih Chang Chen ,  Jin Sun ,  Rodolfo Perez ,  Stanley Wu

IPC: H01L21/687 ,  G01B21/30 ,  G01B5/00 ,  H01L21/67

Abstract: The present disclosure relates to a flexible support to aid in a measurement of flatness of a susceptor. The flexible support has a first support block having a substantially flat upper surface and a lower surface having a first aperture formed therein. The flexible support further has a second support block having a substantially flat lower surface and an upper surface having a second aperture formed therein. The flexible support further has a support pin configured to be receivable in the first aperture and the second aperture, the support pin configured to retain the first support block and the second support block in a spaced apart relation while allowing restricted motion of the first support block relative to the second support block via deformation of the support pin. The flexible support further has a guide disposed between the first support block and the second support block, the guide configured to allow the first support block and the second support block to move axially relative to the guide.