公开(公告)号：US20170308071A1

公开(公告)日：2017-10-26

申请号：US15134234

申请日：2016-04-20

Applicant: Applied Materials, Inc.

Inventor： Mark Robert DENOME ,  Vijayakumar VENUGOPAL ,  Ashish KUMAR ,  Vijai THANGAMANY ,  Somil KAPADIA ,  Ching-Hong HSIEH

IPC: G05B19/418

CPC classification number: G05B19/41885 ,  G05B2219/42155 ,  Y02P90/26

Abstract: A method for wafer point by point analysis includes receiving a selection of manufacturing equipment, utility use data, and utilization data. A water eco-efficiency characterization is calculated based on the utilization data and the utility use data. An emissions eco-efficiency characterization is calculated based on the utilization data and the utility use data. An electrical energy eco-efficiency characterization is calculated based on the utilization data and the utility use data. A combined eco-efficiency characterization is calculated based on the utilization data and water eco-efficiency characterization, emissions eco-efficiency characterization, and electrical energy eco-efficiency characterizations. The combined eco-efficiency characterization is provided for display by a graphical user interface.

公开(公告)号：US20190155265A1

公开(公告)日：2019-05-23

申请号：US16251939

申请日：2019-01-18

Applicant: Applied Materials, Inc.

Inventor： Mark Robert DENOME ,  Vijayakumar VENUGOPAL ,  Ashish KUMAR ,  Vijai THANGAMANY ,  Somil KAPDIA ,  Ching-Hong HSIEH

IPC: G05B19/418

Abstract: A method includes determining, by a processing device, a first eco-efficiency characterization associated with a first design of manufacturing equipment based on one or more of water eco-efficiency characterization, emissions eco-efficiency characterization, or electrical energy eco-efficiency characterization. The water eco-efficiency characterization, the emissions eco-efficiency characterization, the electrical energy eco-efficiency characterization, and the first eco-efficiency characterization are associated with an amount of environmental impact generated by the manufacturing equipment per unit product produced by the manufacturing equipment. The method further includes comparing the first eco-efficiency characterization to a second eco-efficiency characterization that is associated with a second design of the manufacturing equipment. The method further includes implementing the second design of the manufacturing equipment responsive to determining, based on the comparing, that the second eco-efficiency characterization is associated with a lower amount of environmental impact per unit product than the first eco-efficiency characterization.