公开(公告)号：US20170308071A1

公开(公告)日：2017-10-26

申请号：US15134234

申请日：2016-04-20

Applicant: Applied Materials, Inc.

Inventor： Mark Robert DENOME ,  Vijayakumar VENUGOPAL ,  Ashish KUMAR ,  Vijai THANGAMANY ,  Somil KAPADIA ,  Ching-Hong HSIEH

IPC: G05B19/418

CPC classification number: G05B19/41885 ,  G05B2219/42155 ,  Y02P90/26

Abstract: A method for wafer point by point analysis includes receiving a selection of manufacturing equipment, utility use data, and utilization data. A water eco-efficiency characterization is calculated based on the utilization data and the utility use data. An emissions eco-efficiency characterization is calculated based on the utilization data and the utility use data. An electrical energy eco-efficiency characterization is calculated based on the utilization data and the utility use data. A combined eco-efficiency characterization is calculated based on the utilization data and water eco-efficiency characterization, emissions eco-efficiency characterization, and electrical energy eco-efficiency characterizations. The combined eco-efficiency characterization is provided for display by a graphical user interface.

公开(公告)号：US20240077890A1

公开(公告)日：2024-03-07

申请号：US17901670

申请日：2022-09-01

Applicant: Applied Materials, Inc.

Inventor： Maxime CAYER ,  John L. KOENIG ,  Tony H. TONG ,  Shaun W. CRAWFORD ,  James L'HEUREUX ,  Andreas NEUBER ,  Ching-Hong HSIEH

IPC: G05D7/06 ,  B24B37/005 ,  B24B37/34 ,  G05B19/4155

CPC classification number: G05D7/0652 ,  B24B37/005 ,  B24B37/34 ,  G05B19/4155 ,  G05B2219/37371

Abstract: The present disclosure generally relates to methods and system used to collect waste fluids. A system controller is disclosed to control the operation of at least a portion of the system. The controller has a CPU. The fabrication facility includes a first processing system having fluid dispensed therein for processing a material on a part. A first drain is configured to collect the processing fluid as waste fluid after processing the part. The fabrication facility also includes a waste collection system fluidly coupled to the system drain. The waste collection system has two or more valves configured to couple the system drain and two or more facility drains. Each facility drain is uniquely coupled to one of the two or more valves. The CPU is configured to operate the valves between an open and a closed state in response to the fluid entering the system drain.

公开(公告)号：US20190155265A1

公开(公告)日：2019-05-23

申请号：US16251939

申请日：2019-01-18

Applicant: Applied Materials, Inc.

Inventor： Mark Robert DENOME ,  Vijayakumar VENUGOPAL ,  Ashish KUMAR ,  Vijai THANGAMANY ,  Somil KAPDIA ,  Ching-Hong HSIEH

IPC: G05B19/418

Abstract: A method includes determining, by a processing device, a first eco-efficiency characterization associated with a first design of manufacturing equipment based on one or more of water eco-efficiency characterization, emissions eco-efficiency characterization, or electrical energy eco-efficiency characterization. The water eco-efficiency characterization, the emissions eco-efficiency characterization, the electrical energy eco-efficiency characterization, and the first eco-efficiency characterization are associated with an amount of environmental impact generated by the manufacturing equipment per unit product produced by the manufacturing equipment. The method further includes comparing the first eco-efficiency characterization to a second eco-efficiency characterization that is associated with a second design of the manufacturing equipment. The method further includes implementing the second design of the manufacturing equipment responsive to determining, based on the comparing, that the second eco-efficiency characterization is associated with a lower amount of environmental impact per unit product than the first eco-efficiency characterization.