公开(公告)号：US11232965B2

公开(公告)日：2022-01-25

申请号：US16591456

申请日：2019-10-02

Applicant: Applied Materials, Inc.

Inventor： Jacob Newman ,  Ulrich Oldendorf ,  Martin Aenis ,  Andrew J. Constant ,  Shay Assaf ,  Jeffrey C. Hudgens ,  Alexander Berger ,  William Tyler Weaver

IPC: H01L21/677 ,  B65G47/92 ,  H01L21/67 ,  H01L21/687

Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.

公开(公告)号：US11894251B2

公开(公告)日：2024-02-06

申请号：US17647120

申请日：2022-01-05

Applicant: Applied Materials, Inc.

Inventor： Jacob Newman ,  Ulrich Oldendorf ,  Martin Aenis ,  Andrew J. Constant ,  Shay Assaf ,  Jeffrey C. Hudgens ,  Alexander Berger ,  William Tyler Weaver

IPC: H01L21/677 ,  B65G47/92 ,  H01L21/67 ,  H01L21/687

CPC classification number: H01L21/67724 ,  B65G47/92 ,  H01L21/67167 ,  H01L21/67709 ,  H01L21/67712 ,  H01L21/68707

Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.

公开(公告)号：US11139759B2

公开(公告)日：2021-10-05

申请号：US15762052

申请日：2017-08-29

Applicant: Christian Wolfgang Ehmann ,  Britta Späh ,  Martin Aenis ,  Timo Adler ,  Applied Materials, Inc.

Inventor： Christian Wolfgang Ehmann ,  Britta Späh ,  Martin Aenis ,  Timo Adler

IPC: H02N15/00 ,  H01L21/68 ,  H02K41/03 ,  H02K7/09 ,  F16C32/04

Abstract: An apparatus for holding, positioning and/or moving an object is described. The apparatus includes a base, and a carrier which is movable relative to the base. The apparatus further includes at least three magnetic bearings, by means of which the carrier is supported on the base in a contactless manner such that the carrier can be displaced with respect to at least one predefined direction, wherein at least two of the magnetic bearings are configured as actively controllable magnetic bearings. The apparatus has at least one damping unit, which is fixed to the carrier or to the base.