公开(公告)号：US20230137506A1

公开(公告)日：2023-05-04

申请号：US17442415

申请日：2021-08-16

Applicant: Applied Materials, Inc.

Inventor： Thomas DEPPISCH ,  Ezhiylmurugan RANGASAMY ,  Stefan BANGERT ,  Mathew Dean ALLISON

IPC: C23C14/56 ,  C23C14/50 ,  C23C14/54 ,  C23C14/16

Abstract: A processing system for processing a flexible substrate is described. The processing system includes a vacuum chamber having a wall with an opening for the flexible substrate, a substrate support for supporting the flexible substrate during transportation of the flexible substrate through the opening, and a measurement assembly for measuring at least one of a property of the flexible substrate and a property of one or more coatings on the flexible substrate. The measurement assembly and the substrate support are attached to the wall.

公开(公告)号：US20220112594A1

公开(公告)日：2022-04-14

申请号：US17070776

申请日：2020-10-14

Applicant: Applied Materials, Inc.

Inventor： Mathew Dean ALLISON ,  Andreas SAUER

IPC: C23C14/56 ,  C23C14/24

Abstract: A device for sealing a vacuum chamber is described, the vacuum chamber providing a first volume. The device includes an intermediate volume providing a fluid communication between the first volume and a second volume, a first seal for sealing a first conduit associated with the first volume and sealing the first volume from the intermediate volume, a second seal for sealing a second conduit associated with the second volume and sealing the second volume from the intermediate volume, and a third conduit providing a first fluid path to the intermediate volume.

公开(公告)号：US20220056576A1

公开(公告)日：2022-02-24

申请号：US17403273

申请日：2021-09-17

Applicant: Applied Materials, Inc.

Inventor： Thomas DEPPISCH ,  Ezhiylmurugan RANGASAMY ,  Stefan BANGERT ,  Mathew Dean ALLISON

IPC: C23C14/56 ,  H05K1/03 ,  H05K1/11

Abstract: A processing system for processing a flexible substrate is described. The processing system includes a vacuum chamber having a wall with an opening for the flexible substrate, a substrate support for supporting the flexible substrate during transportation of the flexible substrate through the opening, and a measurement assembly for measuring at least one of a property of the flexible substrate and a property of one or more coatings on the flexible substrate. The measurement assembly and the substrate support are attached to the wall.