公开(公告)号：US20250118572A1

公开(公告)日：2025-04-10

申请号：US18483994

申请日：2023-10-10

Applicant: Applied Materials, Inc.

Inventor： Paul R. McHugh ,  Gregory J. Wilson ,  Nolan L. Zimmerman ,  Deepak Saagar Kalaikadal ,  Matthew Paul McHugh ,  Daniil Oliferovskiy

IPC: H01L21/324 ,  H01L21/67 ,  H01L21/68 ,  H01L21/687

Abstract: Exemplary anneal chambers may include a base that defines a chamber interior. The base may include a cooling plate within the chamber interior. The base and the cooling plate may be integral with one another. The chambers may include a lid that is coupled with the base. The chambers may include a heater plate mounted in the chamber interior alongside the cooling plate. The chambers may include a transfer hoop movably coupled within the chamber interior. The base may define a first transfer hoop recess about at least a portion of the heater plate. The base may define a second transfer hoop recess about at least a portion of the cooling plate.