公开(公告)号：US20230261570A1

公开(公告)日：2023-08-17

申请号：US17669702

申请日：2022-02-11

申请人： Applied Materials, Inc.

发明人： Meghna Maheshkumar Patel ,  Mudit Sunilkumar Khasgiwala

IPC分类号： H02M3/156 ,  H02M3/00 ,  H02M1/00 ,  H01F29/00

CPC分类号： H02M3/156 ,  H02M3/003 ,  H02M1/0064 ,  H01F29/00

摘要： An integrated voltage regulator (IVR) for on-chip integrated circuit applications may include a tunable inductor that may be adjusted to generate a target output for the IVR. The tunable inductor may include a piezoelectric material that may cause the relative permeability of the inductor to change based on an applied stimulus voltage. A control circuit may receive a target value, such as a target output voltage, and retrieve or calculate a target inductance value or voltage to be applied to the inductor to generate the target output value. A feedback circuit may monitor the output value and adjust the switching frequency or voltage applied to the inductor during operation in order to adjust the output value.