公开(公告)号：US20230060141A1

公开(公告)日：2023-03-02

申请号：US17977794

申请日：2022-10-31

Applicant: Applied Materials, Inc.

Inventor： Shantanu Rajiv GADGIL ,  Sumit Subhash PATANKAR ,  Nathan Arron DAVIS ,  Michael J. COUGHLIN ,  Allen L. D'AMBRA

IPC: B24B53/017 ,  B24B37/34 ,  C09D5/00 ,  B65D81/32 ,  B05C17/00

Abstract: Chemically impregnated applicators used to provide hydrophobic surfaces on chemical mechanical polishing system components and related application methods are shown. A method of forming a hydrophobic coating on a surface of a polishing system component includes cleaning the surface of the polishing system component to remove a polishing fluid residue therefrom and applying a hydrophobicity causing chemical solution to the surface of the polishing system component.

公开(公告)号：US20220152666A1

公开(公告)日：2022-05-19

申请号：US16953156

申请日：2020-11-19

Applicant: Applied Materials, Inc.

Inventor： Michael J. COUGHLIN ,  Allen L. D'AMBRA

IPC: B08B3/12 ,  B08B13/00

Abstract: Disclosed herein is a sonic cleaning insert. In one example, the sonic cleaning insert includes a carousel configured to rotate about a central axis. The carousel further includes a platform having an outer perimeter. The platform is radially disposed about the central axis. The carousel has an inner ring and an outer ring circumscribing the inner ring. A plurality of partitions couple the inner ring and the outer ring to the platform. The plurality of partitions are arranged at a predetermined angle about the central axis. The carousel further includes a plurality of holders. Each holder is formed from a portion of the platform, a portion of each of the inner ring and outer ring, and a first sidewall and a second sidewall formed from the plurality of partitions. The carousel is configured for immersion in an ultrasonic vibrating fluid.

公开(公告)号：US20210276144A1

公开(公告)日：2021-09-09

申请号：US16813275

申请日：2020-03-09

Applicant: Applied Materials, Inc.

Inventor： Shantanu Rajiv GADGIL ,  Sumit Subhash PATANKAR ,  Nathan Arron DAVIS ,  Michael J. COUGHLIN ,  Allen L. D'AMBRA

IPC: B24B37/34 ,  B65D81/32 ,  C09D5/00

Abstract: Embodiments herein relate to chemically impregnated applicators which may be used to provide hydrophobic surfaces on CMP system components and related application methods. In one embodiment, a method of forming a hydrophobic coating on a surface of a polishing system component includes cleaning the surface of the polishing system component to remove a polishing fluid residue therefrom and applying a hydrophobicity causing chemical solution to the surface of the polishing system component.

公开(公告)号：US20200230661A1

公开(公告)日：2020-07-23

申请号：US16735489

申请日：2020-01-06

Applicant: Applied Materials, Inc.

Inventor： Michael J. COUGHLIN ,  Jianqi WANG

IPC: B08B3/12 ,  B08B3/08

Abstract: In some embodiments, a sonic cleaning system includes a tank configured to receive a liquid that enables propagation of sonic waves and a cylindrical insert located within the tank. The cylindrical insert includes a first end having a first opening and a second end opposite the first end. The second end has a second opening. The cylindrical insert is configured suspend a workpiece between the first opening and the second opening. The sonic cleaning system includes a sonic transducer located within the cylindrical insert.