公开(公告)号：US11022968B2

公开(公告)日：2021-06-01

申请号：US16538676

申请日：2019-08-12

Applicant: Applied Materials, Inc.

Inventor： Jimmy Iskandar ,  Jianping Zou ,  Parris C. M. Hawkins ,  James Moyne

IPC: G05B23/02

Abstract: Described herein are methods, apparatuses, and systems for reducing equipment repair time. Disclosed methods include collecting data including test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility. Disclosed methods include determining a relationship between tool parameter settings for the at least one manufacturing tool and at least some collected data including the test substrate data. The disclosure includes utilizing virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction and applying multivariate run-to-run (R2R) control modeling to obtain a tool parameter adjustment for at least one target parameter for the at least one manufacturing tool. The disclosure further includes applying the R2R control modeling to obtain tool parameter adjustments for at least one manufacturing tool.

公开(公告)号：US11126172B2

公开(公告)日：2021-09-21

申请号：US16538689

申请日：2019-08-12

Applicant: Applied Materials, Inc.

Inventor： Jimmy Iskandar ,  Jianping Zou ,  Parris C. M. Hawkins ,  James Moyne

IPC: G05B23/02

Abstract: Described herein are methods, apparatuses, and systems for reducing equipment repair time. In one embodiment, a computer implemented method includes collecting test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility and determining a relationship between tool parameter settings for the manufacturing tool and the test substrate data. The method further includes utilizing virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction and applying multivariate run-to-run (R2R) control modeling to obtain a state estimation including a current operating region of the at least one manufacturing tool. Applying multivariate run-to-run (R2R) control modeling to obtain tool parameter adjustments for at least one manufacturing tool to reduce maintenance recovery time and to reduce requalification time.