公开(公告)号：US20160342147A1

公开(公告)日：2016-11-24

申请号：US14716838

申请日：2015-05-19

Applicant: Applied Materials, Inc.

Inventor： Jimmy Iskandar ,  Jianping Zou ,  Parris C.M. Hawkins ,  James Moyne

IPC: G05B19/402 ,  G05B19/404

CPC classification number: G05B23/0294 ,  G05B23/024

Abstract: Described herein are methods, apparatuses, and systems for reducing equipment repair time. In one embodiment, a computer implemented method includes collecting, with a system, data including test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility and determining, with the system, a relationship between tool parameter settings for the at least one manufacturing tool and at least some collected data including the test substrate data. The method further includes utilizing zero or more virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction and applying multivariate run-to-run (R2R) control modeling to obtain a state estimation including a current operating region of the at least one manufacturing tool based on the test substrate data and obtain at least one tool parameter adjustment for at least one target parameter for the at least one manufacturing tool. Applying multivariate run-to-run (R2R) control modeling to obtain tool parameter adjustments for at least one manufacturing tool occurs after maintenance to reduce maintenance recovery time and to reduce requalification time.

Abstract translation: 这里描述了用于减少设备维修时间的方法，装置和系统。 在一个实施例中，计算机实现的方法包括与系统一起收集包括测试基板数据或其他测量数据和故障检测数据的数据，用于在制造设备中维护至少一个制造工具的恢复，并且与系统确定关系 在至少一个制造工具的工具参数设置和包括测试衬底数据的至少一些收集的数据之间。 该方法还包括利用零个或多个虚拟测量预测算法和至少一些收集的数据来获得度量预测和应用多变量运行（R2R）控制建模，以获得包括至少至少的当前操作区域的状态估计 一个基于测试基板数据的制造工具，并为至少一个制造工具的至少一个目标参数获得至少一个刀具参数调整。 应用多变量运行（R2R）控制建模以获得至少一个制造工具的工具参数调整，在维护后发生，以减少维护恢复时间并减少重新定标时间。

公开(公告)号：US11126172B2

公开(公告)日：2021-09-21

申请号：US16538689

申请日：2019-08-12

Applicant: Applied Materials, Inc.

Inventor： Jimmy Iskandar ,  Jianping Zou ,  Parris C. M. Hawkins ,  James Moyne

IPC: G05B23/02

Abstract: Described herein are methods, apparatuses, and systems for reducing equipment repair time. In one embodiment, a computer implemented method includes collecting test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility and determining a relationship between tool parameter settings for the manufacturing tool and the test substrate data. The method further includes utilizing virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction and applying multivariate run-to-run (R2R) control modeling to obtain a state estimation including a current operating region of the at least one manufacturing tool. Applying multivariate run-to-run (R2R) control modeling to obtain tool parameter adjustments for at least one manufacturing tool to reduce maintenance recovery time and to reduce requalification time.

公开(公告)号：US11022968B2

公开(公告)日：2021-06-01

申请号：US16538676

申请日：2019-08-12

Applicant: Applied Materials, Inc.

Inventor： Jimmy Iskandar ,  Jianping Zou ,  Parris C. M. Hawkins ,  James Moyne

IPC: G05B23/02

Abstract: Described herein are methods, apparatuses, and systems for reducing equipment repair time. Disclosed methods include collecting data including test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility. Disclosed methods include determining a relationship between tool parameter settings for the at least one manufacturing tool and at least some collected data including the test substrate data. The disclosure includes utilizing virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction and applying multivariate run-to-run (R2R) control modeling to obtain a tool parameter adjustment for at least one target parameter for the at least one manufacturing tool. The disclosure further includes applying the R2R control modeling to obtain tool parameter adjustments for at least one manufacturing tool.

公开(公告)号：US09746841B2

公开(公告)日：2017-08-29

申请号：US14268418

申请日：2014-05-02

Applicant: Applied Materials, Inc.

Inventor： Jianping Zou

IPC: G05B13/02 ,  G05B17/02 ,  H04L29/08

CPC classification number: G05B17/02 ,  H04L67/10

Abstract: A system and method for reducing pilot runs of run-to-run control in a manufacturing facility calculates an unbiased estimation of an independent model intercept based on a state space model associated with the manufacturing facility. A determination is made as to whether to perform a pilot run in the manufacturing facility. Upon determining that the run is to be performed, an indication that the pilot run is to be performed is generated. Pilot run data is received in response to the pilot run being performed, and the state space model is updated based on the received data.

公开(公告)号：US20150316916A1

公开(公告)日：2015-11-05

申请号：US14268418

申请日：2014-05-02

Applicant: Applied Materials, Inc.

Inventor： Jianping Zou

IPC: G05B17/02 ,  H04L29/08

CPC classification number: G05B17/02 ,  H04L67/10

Abstract: A system and method for reducing pilot runs of run-to-run control in a manufacturing facility calculates an unbiased estimation of an independent model intercept based on a state space model associated with the manufacturing facility. A determination is made as to whether to perform a pilot run in the manufacturing facility. Upon determining that the run is to be performed, an indication that the pilot run is to be performed is generated. Pilot run data is received in response to the pilot run being performed, and the state space model is updated based on the received data.

Abstract translation: 用于减少制造设施中的运行控制的先导运行的系统和方法基于与制造设备相关联的状态空间模型来计算独立模型截距的无偏估计。 确定是否在制造设施中执行先导运行。 在确定要执行运行时，生成要执行先导运行的指示。 响应于正在执行的导频运行而接收导频运行数据，并且基于接收到的数据来更新状态空间模型。