公开(公告)号：US10140394B2

公开(公告)日：2018-11-27

申请号：US14841365

申请日：2015-08-31

Applicant: Applied Materials, Inc.

Inventor： Subrahmanyam Venkata Rama Kommisetti ,  Haw Jyue Luo ,  Jimmy Iskandar ,  Hsincheng Lai ,  Parris Hawkins

IPC: G06F17/50 ,  H05B37/03 ,  G06F7/556 ,  G05B23/02

Abstract: Embodiments disclosed herein include methods for reducing or eliminating the impact of tuning disturbances during prediction of lamp failure. In one embodiment, the method comprises monitoring data of a lamp module for a process chamber using one or more physical sensors disposed at different locations within the lamp module, creating virtual sensors based on monitoring data of the lamp module, and providing a prediction model for the lamp module using the virtual sensors as inputs.