公开(公告)号：US11940819B1

公开(公告)日：2024-03-26

申请号：US18099853

申请日：2023-01-20

Applicant: Applied Materials, Inc.

Inventor： Abhishek Chowdhury ,  Ravikumar Patil ,  Arun Chakravarthy Chakravarthy ,  Jon Christian Farr ,  Saravanan Chandrabalu ,  Prabhuraj Kuberan

IPC: G05D11/13 ,  B01F23/10 ,  F17D1/04 ,  F17D3/01

CPC classification number: G05D11/132 ,  B01F23/191 ,  F17D1/04 ,  F17D3/01 ,  Y10T137/87249

Abstract: Embodiments of fast gas exchange (FGE) manifolds are provided herein. In some embodiments, a FGE manifold includes: a manifold housing having a plurality of inlets and a plurality of outlets for flowing a plurality of process gases therethrough, wherein the plurality of outlets correspond with a plurality of zones in the process chamber; a plurality of hybrid valves disposed in the manifold housing and fluidly coupled to the plurality of inlets; a plurality of mass flow controllers disposed in the manifold housing downstream of the plurality of hybrid valves; a plurality of mixing lines extending downstream from the plurality of mass flow controllers to a plurality of outlet lines; and a plurality of outlet valves disposed in line with corresponding ones of the plurality of outlet lines, wherein a flow path is defined between each inlet of the plurality of inlets and each outlet of the plurality of outlets.