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公开(公告)号:US11600477B2
公开(公告)日:2023-03-07
申请号:US17121603
申请日:2020-12-14
发明人: Kirankumar Neelasandra Savandaiah , Shane Lavan , Sundarapandian Ramalinga Vijayalakshmi Reddy , Randal Dean Schmieding , Yong Cao
摘要: Embodiments of process shield for use in process chambers are provided herein. In some embodiments, a process shield for use in a process chamber includes: an annular body having an upper portion and a lower portion extending downward and radially inward from the upper portion, wherein the upper portion includes a plurality of annular trenches on an upper surface thereof and having a plurality of slots disposed therebetween to fluidly couple the plurality of annular trenches, wherein one or more inlets extend from an outer surface of the annular body to an outermost trench of the plurality of annular trenches.