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公开(公告)号：US20220262657A1
公开(公告)日：2022-08-18
申请号：US17630492
申请日：2020-06-30
Applicant: Applied Materials, Inc.
Inventor： Rohit MAHAKALI , Wenfei ZHANG , Chaitanya Anjaneyalu PRASAD
IPC: H01L21/67 , H01L21/687
Abstract: A method and apparatus for improved temperature control of a substrate is disclosed. In one embodiment, a pedestal is disclosed that includes a top plate, and a base plate coupled to the top plate, wherein the top plate comprises a multi-zone heater and the base plate comprises a plurality of grooves formed in a bottom surface thereof.
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