公开(公告)号：US20250166973A1

公开(公告)日：2025-05-22

申请号：US18813855

申请日：2024-08-23

Applicant: Applied Materials, Inc.

Inventor： Rohit Ode ,  Sanjeev Baluja ,  Kenneth Brian Doering ,  Kevin Griffin ,  Hanhong Chen

IPC: H01J37/32

Abstract: Plasma showerhead assemblies are disclosed comprising a conductive plate having a plurality of the conductive plate gas openings, a dielectric faceplate having a thickness and a plurality of dielectric faceplate gas openings extending through the dielectric faceplate thickness in fluid communication with the plurality of the conductive plate gas openings. A plurality of tri-lobed o-rings surrounding the conductive plate gas openings and the dielectric faceplate gas openings are configured to form a seal between the dielectric faceplate gas openings and the conductive plate gas openings from atmospheric pressure.

公开(公告)号：US20250163578A1

公开(公告)日：2025-05-22

申请号：US18627046

申请日：2024-04-04

Applicant: Applied Materials, Inc.

Inventor： Hanhong Chen ,  Kenneth Brian Doering ,  Sanjeev Baluja ,  Chi-Chou Lin ,  Kevin Griffin ,  Joseph AuBuchon ,  Zhejun Zhang ,  Rohit Ode ,  Tejas Umesh Ulavi

IPC: C23C16/455 ,  H01J37/32

Abstract: Plasma showerhead assemblies are disclosed comprising a conductive plate having a plurality of the conductive plate openings, a dielectric faceplate having a thickness and a plurality of dielectric faceplate gas openings extending through the dielectric faceplate thickness in fluid communication with the plurality of the conductive plate gas openings. A conductive insert is disposed within at least one of the dielectric faceplate gas openings or adjacent o-rings included in the plasma showerhead assemblies.