公开(公告)号：US11684941B2

公开(公告)日：2023-06-27

申请号：US17098606

申请日：2020-11-16

Applicant: Applied Materials, Inc.

Inventor： Kenneth Brian Doering

IPC: B05B15/62 ,  H01L21/67 ,  B05B1/18

CPC classification number: B05B15/62 ,  B05B1/18 ,  H01L21/67017

Abstract: A showerhead with an embedded nut is disclosed. The showerhead comprises an embedded nut within a cavity. The nut may be engaged by a bolt through an opening in the cavity to support the showerhead. The apparatus allows for the support of the showerhead without the potential for metal contamination.

公开(公告)号：US20250037978A1

公开(公告)日：2025-01-30

申请号：US18225454

申请日：2023-07-24

Applicant: Applied Materials, Inc.

Inventor： Sanjeev Baluja ,  Chaowei Wang ,  Kevin Griffin ,  Kenneth Brian Doering ,  Hanhong Chen ,  Joseph AuBuchon

IPC: H01J37/32 ,  H01L21/67

Abstract: Gas distribution assemblies for semiconductor devices are described. The gas distribution assemblies include a backplate, a faceplate, a counterbored hole, and at least one orifice. The at least one orifice includes, for example, at least one straight orifice, or at least two angled orifices. Some embodiments of the gas distribution assemblies provide for reduced plasma damage in a processing chamber. Some embodiments of the gas distribution assemblies provide for reduced jetting on a substrate in a processing chamber. Methods of reducing plasma damage in gas distribution assemblies are also described.

公开(公告)号：US20230317416A1

公开(公告)日：2023-10-05

申请号：US17712046

申请日：2022-04-01

Applicant: Applied Materials, Inc.

Inventor： Chaowei Wang ,  Kenneth Brian Doering ,  Hanhong Chen ,  Kartik Shah ,  Kevin Griffin ,  Hao Zhang

IPC: H01J37/32

CPC classification number: H01J37/3244 ,  H01J37/3222

Abstract: Plasma showerheads with improved gas uniformity are disclosed. One or more embodiment of the disclosure provides a plasma showerhead with angled gas nozzles. Some embodiments of the disclosure have gas nozzles angled by a vertical offset angle and/or a directional offset angle. None of the gas channels and/or the gas nozzles intersect with the plasma regions of the showerhead.

公开(公告)号：US20240395506A1

公开(公告)日：2024-11-28

申请号：US18388250

申请日：2023-11-09

Applicant: Applied Materials, Inc.

Inventor： Kenneth Brian Doering ,  Xiaokang Yang ,  Sathya Swaroop Ganta

IPC: H01J37/32

Abstract: A microwave plasma impedance transformers comprising a thermal break and methods of use are described. The impedance transformer comprises a housing having a first end and a second end defining a length of the housing. The housing has a channel with channel walls extending through the length from the first end to the second end, and the channel has an opening in the first end of the housing with a first end diameter and an opening in the second end of the housing with a second end diameter. The first end diameter being greater than the second end diameter. The channel acts as a conical impedance transformer.

公开(公告)号：US11584993B2

公开(公告)日：2023-02-21

申请号：US17074035

申请日：2020-10-19

Applicant: Applied Materials, Inc.

Inventor： Jared Ahmad Lee ,  Sanjeev Baluja ,  Joseph AuBuchon ,  Kenneth Brian Doering ,  Dhritiman Subha Kashyap ,  Kartik Shah

IPC: H01J37/32 ,  C23C16/455 ,  C23C16/44

Abstract: Gas distribution assemblies and methods for providing a flow of gases to a process station are described. The gas distribution assemblies comprise a pumping liner with a showerhead and a gas funnel positioned therein. The pumping liner has an inner wall that slants at a first angle relative to a central axis of the gas distribution assembly so that the inner wall adjacent the bottom wall of the pumping liner is closer to the central axis than the inner wall adjacent the top wall. The gas funnel and pumping liner form a plenum between the outer wall of the gas funnel, a cavity in the bottom wall of the gas funnel and the inner wall of the pumping liner.

公开(公告)号：US20230076170A1

公开(公告)日：2023-03-09

申请号：US17466403

申请日：2021-09-03

Applicant: Applied Materials, Inc.

Inventor： Kenneth Brian Doering ,  Vivek B. Shah ,  Ashutosh Agarwal ,  Sanjeev Baluja ,  Shrihari Sampathkumar ,  Chunlei Zhang

IPC: H01L21/67 ,  H01L21/66

Abstract: Metrology slot plates, processing chamber lids and processing chambers having metrology slot plates are described. Each of the metrology slot plates independently comprises one or more of a plate blank, a reflectometer, a capacitance sensor, a gas flow meter, a manometer, a pyrometer, a distance sensor (laser) or an emissometer.

公开(公告)号：US11584992B2

公开(公告)日：2023-02-21

申请号：US17512263

申请日：2021-10-27

Applicant: Applied Materials, Inc.

Inventor： Kenneth Brian Doering ,  Mario D. Silvetti ,  Kevin Griffin

IPC: C23C16/40 ,  C23C16/455 ,  C23C16/458

Abstract: Gas injector inserts having a wedge-shaped housing, at least one first slot and at least one second slot are described. The housing has a first opening in the back face that is in fluid communication with the first slot in the front face and a second opening in the back face that is in fluid communication with the second slot in the front face. Each of the first slot and the second slot has an elongate axis that extends from the inner peripheral end to the outer peripheral end of the housing. The gas injector insert is configured to provide a flow of gas through the first slots at supersonic velocity. Gas distribution assemblies and processing chambers including the gas injector inserts are described.

公开(公告)号：US20220119948A1

公开(公告)日：2022-04-21

申请号：US17074035

申请日：2020-10-19

Applicant: Applied Materials, Inc.

Inventor： Jared Ahmad Lee ,  Sanjeev Baluja ,  Joseph AuBuchon ,  Kenneth Brian Doering ,  Dhritiman Subha Kashyap ,  Kartik Shah

IPC: C23C16/455 ,  C23C16/44

Abstract: Gas distribution assemblies and methods for providing a flow of gases to a process station are described. The gas distribution assemblies comprise a pumping liner with a showerhead and a gas funnel positioned therein. The pumping liner has an inner wall that slants at a first angle relative to a central axis of the gas distribution assembly so that the inner wall adjacent the bottom wall of the pumping liner is closer to the central axis than the inner wall adjacent the top wall. The gas funnel and pumping liner form a plenum between the outer wall of the gas funnel, a cavity in the bottom wall of the gas funnel and the inner wall of the pumping liner.

公开(公告)号：US20210146394A1

公开(公告)日：2021-05-20

申请号：US17098606

申请日：2020-11-16

Applicant: Applied Materials, Inc.

Inventor： Kenneth Brian Doering

IPC: B05B15/62 ,  B05B1/18 ,  H01L21/67

Abstract: A showerhead with an embedded nut is disclosed. The showerhead comprises an embedded nut within a cavity. The nut may be engaged by a bolt through an opening in the cavity to support the showerhead. The apparatus allows for the support of the showerhead without the potential for metal contamination.

公开(公告)号：US20190382896A1

公开(公告)日：2019-12-19

申请号：US16444543

申请日：2019-06-18

Applicant: Applied Materials, Inc.

Inventor： Kenneth Brian Doering ,  Mario D. Silvetti ,  Kevin Griffin

IPC: C23C16/455 ,  C23C16/458

Abstract: Gas injector inserts having a wedge-shaped housing, at least one first slot and at least one second slot are described. The housing has a first opening in the back face that is in fluid communication with the first slot in the front face and a second opening in the back face that is in fluid communication with the second slot in the front face. Each of the first slot and the second slot has an elongate axis that extends from the inner peripheral end to the outer peripheral end of the housing. The gas injector insert is configured to provide a flow of gas through the first slots at supersonic velocity. Gas distribution assemblies and processing chambers including the gas injector inserts are described.