公开(公告)号：US20240086597A1

公开(公告)日：2024-03-14

申请号：US18244787

申请日：2023-09-11

Applicant: Applied Materials, Inc.

Inventor： Sundar Narayanan ,  Samit Barai ,  Nusrat Jahan Chhanda ,  Dheeraj Kumar ,  Pardeep Kumar ,  Anantha R. Sethuraman ,  Raman Krishnan Nurani

IPC: G06F30/27

CPC classification number: G06F30/27

Abstract: A method includes receiving profile data of a plurality of features of a substrate. The method further includes generating a typical profile based on the profile data of the plurality of features. The method further includes generating a first array of features. Each of the first array of features is based on the typical profile. The method further includes providing the first array of features to a process model. The method further includes obtaining first output from the process model based on the first array of features. The method further includes causing performance of a corrective action in view of the first output from the process model.

公开(公告)号：US20240054333A1

公开(公告)日：2024-02-15

申请号：US17884462

申请日：2022-08-09

Applicant: Applied Materials, Inc.

Inventor： Bharath Ram Sundar ,  Samit Barai ,  Raman Krishnan Nurani ,  Anantha R. Sethuraman

IPC: G06N3/08

CPC classification number: G06N3/08

Abstract: A method includes receiving, by a processing device, data indicative of a plurality of measurements of a profile of a substrate. The method further includes separating the data into a plurality of sets of data, a first set of the plurality of sets associated with a first region of the profile, and a second set of the plurality of sets associated with a second region of the profile. The method further includes fitting data of the first set to a first function to generate a first fit function. The first function is selected from a library of functions. The method further includes fitting data of the second set to a second function to generate a second fit function. The method further includes generating a piecewise functional fit of the profile of the substrate. The piecewise functional fit includes the first fit function and the second fit function.

公开(公告)号：US20240152675A1

公开(公告)日：2024-05-09

申请号：US17982157

申请日：2022-11-07

Applicant: Applied Materials, Inc.

Inventor： Dheeraj Kumar ,  Samit Barai ,  Pardeep Kumar ,  Sundar Narayanan ,  Anantha Sethuraman

IPC: G06F30/31 ,  G06F30/3308

CPC classification number: G06F30/31 ,  G06F30/3308

Abstract: A method includes receiving feature data defining a plurality of features of a virtual substrate. The method further includes preparing the virtual substrate for display on a graphical user interface (GUI). The method further includes receiving one or more first inputs via the GUI. The one or more first inputs are associated with one or more locations of the virtual substrate. The method further includes defining a three-dimensional measurement probe based on the one or more first inputs. The method further includes outputting a measurement of the measurement probe. The measurement is associated with a characteristic of the virtual substrate measured by the three-dimensional measurement probe.