公开(公告)号：US20240375066A1

公开(公告)日：2024-11-14

申请号：US18195755

申请日：2023-05-10

Applicant: Applied Materials, Inc.

Inventor： Shreyas PATIL S ,  Sandesh Y D ,  Manjunatha P. KOPPA

IPC: B01F25/314 ,  B01F23/10 ,  B01F35/221

Abstract: Methods and apparatus for gas mixing are provided. In some embodiments, a gas mixing apparatus includes: a tubular body having a wall extending longitudinally from a first end to a second end and having an outer side and an inner side that surrounds a central through opening and defining a first flow path between the first end and the second end; one or more inlet holes formed in the outer side of the wall; a plurality of exit holes formed in the inner side of the wall and communicating with the central through opening; and a plurality of longitudinal channels formed within the wall fluidly coupled to the one or more inlet holes and the plurality of exit holes, wherein the one or more inlet holes, the plurality of exit holes, and the plurality of longitudinal channels define a recursive second flow path that intersects with the first flow path.