公开(公告)号：US20210032753A1

公开(公告)日：2021-02-04

申请号：US16934343

申请日：2020-07-21

Applicant: APPLIED MATERIALS, INC.

Inventor： Jallepally RAVI ,  Dien-Yeh WU ,  Pingyan LEI ,  Manjunatha P. KOPPA ,  Vinod Konda PURATHE ,  Takashi KURATOMI ,  Mei CHANG ,  Xiaoxiong YUAN

IPC: C23C16/455 ,  H01J37/32

Abstract: Methods and apparatus for gas distribution in a process chamber leverage dual electrodes to provide RF power and an RF ground return in a single showerhead. In some embodiments, the apparatus includes a showerhead composed of a non-metallic material with a first gas channel and a second gas channel, the first gas channel and the second gas channel being independent of each other, and the first gas channel including a plurality of through holes from a top surface of the showerhead to a bottom surface of the showerhead and the second gas channel including a plurality of holes on the bottom surface of the showerhead connected to one or more gas inlets on a side of the showerhead, a first electrode embedded in the showerhead near a top surface of the showerhead, and a second electrode embedded in the showerhead near a bottom surface of the showerhead.

公开(公告)号：US20240375066A1

公开(公告)日：2024-11-14

申请号：US18195755

申请日：2023-05-10

Applicant: Applied Materials, Inc.

Inventor： Shreyas PATIL S ,  Sandesh Y D ,  Manjunatha P. KOPPA

IPC: B01F25/314 ,  B01F23/10 ,  B01F35/221

Abstract: Methods and apparatus for gas mixing are provided. In some embodiments, a gas mixing apparatus includes: a tubular body having a wall extending longitudinally from a first end to a second end and having an outer side and an inner side that surrounds a central through opening and defining a first flow path between the first end and the second end; one or more inlet holes formed in the outer side of the wall; a plurality of exit holes formed in the inner side of the wall and communicating with the central through opening; and a plurality of longitudinal channels formed within the wall fluidly coupled to the one or more inlet holes and the plurality of exit holes, wherein the one or more inlet holes, the plurality of exit holes, and the plurality of longitudinal channels define a recursive second flow path that intersects with the first flow path.