公开(公告)号：US11456301B2

公开(公告)日：2022-09-27

申请号：US16931154

申请日：2020-07-16

Applicant: Applied Materials, Inc.

Inventor： Arvind Kumar ,  Mahendra Pakala ,  Sanjeev Manhas ,  Satendra Kumar Gautam

IPC: H01L27/108 ,  H01L21/28 ,  H01L29/49

Abstract: Embodiments of the present disclosure generally relate to a storage device. More specifically, embodiments described herein generally relate to a dynamic random-access memory and the method of making thereof. In one embodiment, a cell array includes at least an active region and a field region adjacent to the active region. The active region includes at least one trench, a dielectric layer disposed in the trench, a first conformal layer disposed on the dielectric layer, and a conductive material disposed on the first conformal layer. The field region includes a trench, a dielectric layer disposed in the trench, a second conformal layer disposed on the dielectric layer, and a conductive material disposed on the second conformal layer. The second conformal layer has a different composition than the first conformal layer.

公开(公告)号：US10727232B2

公开(公告)日：2020-07-28

申请号：US16243551

申请日：2019-01-09

Applicant: Applied Materials, Inc.

Inventor： Arvind Kumar ,  Mahendra Pakala ,  Sanjeev Manhas ,  Satendra Kumar Gautam

IPC: H01L27/108 ,  H01L21/28 ,  H01L29/49

Abstract: Embodiments of the present disclosure generally relate to a storage device. More specifically, embodiments described herein generally relate to a dynamic random-access memory and the method of making thereof. In one embodiment, a cell array includes at least an active region and a field region adjacent to the active region. The active region includes at least one trench, a dielectric layer disposed in the trench, a first conformal layer disposed on the dielectric layer, and a conductive material disposed on the first conformal layer. The field region includes a trench, a dielectric layer disposed in the trench, a second conformal layer disposed on the dielectric layer, and a conductive material disposed on the second conformal layer. The second conformal layer has a different composition than the first conformal layer.