公开(公告)号：USD1027120S1

公开(公告)日：2024-05-14

申请号：US29762536

申请日：2020-12-17

Applicant: Applied Materials, Inc.

Designer： Yao-Hung Yang ,  Eric Ruhland ,  Saurabh M. Chaudhari ,  Dien-Yeh Wu ,  Philip Wayne Nagle ,  Aniruddha Pal ,  Sudhir R. Gondhalekar ,  Siamak Salimian ,  Scott Lin ,  Boon Sen Chan

Abstract: FIG. 1 is top perspective view of a seal for an assembly in a vapor deposition chamber.
FIG. 2 is a bottom perspective view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.
FIG. 3 is a top plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.
FIG. 4 is a bottom plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.
FIG. 5 is a front view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.
FIG. 6 is a rear view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.
FIG. 7 is a right side view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.
FIG. 8 is a left side view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.
FIG. 9 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of an outer segment of the seal.
FIG. 10 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of a central segment of the seal.
FIG. 11 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of an outer segment of the seal.
FIG. 12 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 2 showing details of an outer segment of the seal.
FIG. 13 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 3 showing details of a central segment of the seal.
FIG. 14 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 4 showing details of a central segment of the seal.
FIG. 15 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 6 showing details of an outer segment of the seal.
FIG. 16 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 7 showing details of an outer segment of the seal; and,
FIG. 17 is a top plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 3 shown in a portion of an assembly (in phantom).
The broken and phantom lines in the Figures illustrate unclaimed parts of the seal for an assembly in a vapor deposition chamber and form no part of the claimed design.