公开(公告)号：US20150059974A1

公开(公告)日：2015-03-05

申请号：US14059251

申请日：2013-10-21

Applicant: Applied Materials, Inc.

Inventor： Wendell Glen BOYD, JR. ,  Vijay D. PARKHE ,  Sehn THACH

IPC: H01L21/683 ,  C23C16/458 ,  C23C16/06

CPC classification number: C23C16/4584 ,  C23C14/042 ,  C23C14/221 ,  C23C14/50 ,  C23C16/06 ,  C23C16/4581 ,  C23C16/463 ,  C23C16/50 ,  C23C16/507 ,  H01L21/67109 ,  H01L21/6831 ,  H01L21/6833 ,  H01L21/68757

Abstract: Embodiments of the invention may generally provide a method and apparatus that is used to prepare new and used substrate support assemblies for use in typical semiconductor processing environments. Embodiments of the present invention generally relate to a method of coating a new substrate support assembly or a used substrate support assembly that is being refurbished. The deposited coating may include a surface enhancement and/or protective material that is configured to protect one or more of the components exposed to the processing environment during a semiconductor process. The substrate support assembly may be coated with a protective material and during the coating process, the substrate support assembly is maintained at a temperature that is less than or equal to 150° C. by flowing a coolant through channels formed in a base of the substrate support assembly.

Abstract translation: 本发明的实施例通常可以提供一种用于制备用于典型的半导体处理环境的新的和使用过的衬底支撑组件的方法和装置。 本发明的实施例通常涉及涂覆新的衬底支撑组件或正被翻新的已使用的衬底支撑组件的方法。 沉积的涂层可以包括表面增强和/或保护材料，其被配置为在半导体工艺期间保护暴露于处理环境的一个或多个组件。 衬底支撑组件可以用保护材料涂覆，并且在涂覆过程期间，通过使冷却剂流过形成在衬底的基底中的通道，将衬底支撑组件保持在小于或等于150℃的温度 支撑装配。

公开(公告)号：US20150138687A1

公开(公告)日：2015-05-21

申请号：US14158112

申请日：2014-01-17

Applicant: Applied Materials, Inc.

Inventor： Wendell BOYD, JR. ,  Vijay D. PARKHE ,  Matthew BUSCHE ,  Konstantin MAKHRATCHEV ,  Masanori ONO ,  Sehn THACH

IPC: H01L21/683

CPC classification number: H01L21/6833 ,  H01L21/67288

Abstract: A control system that includes deflection sensors which can control clamping forces applied by electrostatic chucks, and related methods are disclosed. By using a sensor to determine a deflection of a workpiece supported by an electrostatic chuck, a control system may use the deflection measured to control a clamping force applied to the workpiece by the electrostatic chuck. The control system applies a clamping voltage to the electrostatic chuck so that the clamping force reaches and maintains a target clamping force. In this manner, the clamping force may secure the workpiece to the electrostatic chuck to enable manufacturing operations to be performed while preventing workpiece damage resulting from unnecessary higher values of the clamping force.

Abstract translation: 公开了一种包括能够控制由静电卡盘施加的夹持力的偏转传感器的控制系统及相关方法。 通过使用传感器来确定由静电卡盘支撑的工件的偏转，控制系统可以使用测量的偏转来控制由静电卡盘施加到工件的夹紧力。 控制系统对静电卡盘施加钳位电压，使得夹紧力达到并保持目标夹紧力。 以这种方式，夹紧力可以将工件固定到静电卡盘，以使得能够进行制造操作，同时防止由于不必要的较高的夹紧力而导致的工件损坏。