公开(公告)号：US09892947B2

公开(公告)日：2018-02-13

申请号：US14993596

申请日：2016-01-12

Applicant: Applied Materials, Inc.

Inventor： Ronald Vern Schauer ,  Raphael Dascoli ,  Shivan Bhargava

IPC: H01L21/67 ,  C23C14/50 ,  H01L21/68 ,  H01L21/683 ,  H01L21/687 ,  G01P3/00 ,  G01P13/00 ,  G05B19/418

CPC classification number: H01L21/67259 ,  C23C14/505 ,  G01P3/00 ,  G01P13/00 ,  G05B19/418 ,  G05B2219/45031 ,  H01L21/67115 ,  H01L21/681 ,  H01L21/6838 ,  H01L21/68764 ,  H01L21/68792

Abstract: A chamber monitoring system may include a parallel architecture in which a single sensor control system is coupled to a number of different processing chamber control board sensor lines. In an illustrative embodiment, a single rotation sensor such as a tachometer may reside in a central control unit remote from the processing chambers such that rotation data may be processed by a single system and thereafter routed according to a variety of different network communication protocols to the main system controller, a factory interface, or both. In this and other embodiments, pull-up networks in the central control unit and the chamber control boards are matched so as to reduce electrical signal anomalies such as crowbar effects. The central control unit may be programmed via a main system controller to operate according to user defined parameters, which in turn may enable the system to differentiate between certain operating states.

公开(公告)号：US20160126121A1

公开(公告)日：2016-05-05

申请号：US14993596

申请日：2016-01-12

Applicant: Applied Materials, Inc.

Inventor： Ronald Vern Schauer ,  Raphael Dascoli ,  Shivan Bhargava

IPC: H01L21/67 ,  G05B19/418 ,  G01P3/00 ,  H01L21/687 ,  G01P13/00

CPC classification number: H01L21/67259 ,  C23C14/505 ,  G01P3/00 ,  G01P13/00 ,  G05B19/418 ,  G05B2219/45031 ,  H01L21/67115 ,  H01L21/681 ,  H01L21/6838 ,  H01L21/68764 ,  H01L21/68792

Abstract: A chamber monitoring system may include a parallel architecture in which a single sensor control system is coupled to a number of different processing chamber control board sensor lines. In an illustrative embodiment, a single rotation sensor such as a tachometer may reside in a central control unit remote from the processing chambers such that rotation data may be processed by a single system and thereafter routed according to a variety of different network communication protocols to the main system controller, a factory interface, or both. In this and other embodiments, pull-up networks in the central control unit and the chamber control boards are matched so as to reduce electrical signal anomalies such as crowbar effects. The central control unit may be programmed via a main system controller to operate according to user defined parameters, which in turn may enable the system to differentiate between certain operating states.

Abstract translation: 室监视系统可以包括其中单个传感器控制系统耦合到多个不同处理室控制板传感器线的并行结构。 在说明性实施例中，诸如转速计的单个旋转传感器可以驻留在远离处理室的中央控制单元中，使得旋转数据可以由单个系统处理，然后根据各种不同的网络通信协议被路由到 主系统控制器，工厂接口或两者兼容。 在该实施例和其他实施例中，中央控制单元和室控制板中的上拉网络匹配，以便减少电信号异常，例如撬棍效应。 中央控制单元可以经由主系统控制器来编程，以根据用户定义的参数进行操作，这进而可以使得系统能够区分某些操作状态。