公开(公告)号：US20250116500A1

公开(公告)日：2025-04-10

申请号：US18378543

申请日：2023-10-10

Applicant: Applied Materials, Inc.

Inventor： Trishul BYREGOWDA SHIVALINGAIAH ,  Skanda Simha CHANDRASHEKAR ,  Karthik Melinamane PRABHAKAR ,  Mahadev JOSHI ,  Peter F. DEMONTE

IPC: G01B9/02

Abstract: Embodiments of interferometric endpoint (IEP) housing assemblies for endpoint detection of plasma processing are provided herein. In some embodiments, IEP housing assemblies include: an IEP housing having an upper end configured to interface with a light source and having an internal cavity, wherein a lower end of the IEP housing is configured to interface with a dome assembly of a process chamber; a bracket having a body disposed about the IEP housing and having a plurality of arms extending radially outward from the body; and a plurality of biasing members extending from the body to the IEP housing and configured to hold the IEP housing within the body while allowing side-to-side deflection.