公开(公告)号：US20150000598A1

公开(公告)日：2015-01-01

申请号：US13940587

申请日：2013-07-12

Applicant: Applied Materials, Inc.

Inventor： Gerd HOFFMANN ,  Sven SCHRAMM ,  Roland TRASSL

IPC: C23C16/448

CPC classification number: C23C16/448 ,  C23C14/0021 ,  C23C14/081 ,  C23C14/24 ,  C23C14/243 ,  C23C14/562

Abstract: An evaporation apparatus for depositing material on a substrate by a drum is described. The evaporation apparatus includes a first set of evaporation crucibles aligned in a first line a first direction for depositing evaporated material on the substrate; a first gas supply pipe extending in the first direction being arranged between at least one of the evaporation crucibles of the first set of evaporation crucibles and the drum; and a second gas supply pipe extending in the first direction for providing a gas between the first set of evaporation crucibles and the drum with openings shaped and positioned to improve the uniformity of the deposition of the material.

Abstract translation: 描述了一种用于通过滚筒将材料沉积在基底上的蒸发装置。 蒸发装置包括第一组蒸发坩埚，第一组排列在第一方向上，用于在基板上沉积蒸发的材料; 沿第一方向延伸的第一气体供给管布置在第一组蒸发坩埚的蒸发坩埚中的至少一个与滚筒之间; 以及第二气体供应管，其在所述第一方向上延伸，以在所述第一组蒸发坩埚和所述鼓之间提供形成并定位的开口的气体，以改善所述材料的沉积的均匀性。