公开(公告)号：US20200011652A1

公开(公告)日：2020-01-09

申请号：US16026982

申请日：2018-07-03

Applicant: Applied Materials, Inc.

Inventor： Benjamin M. JOHNSTON ,  Cheuk Ming LEE ,  Jae Myung YOO ,  Glen Alan GOMES ,  David Michael CORRIVEAU ,  Thang Duc NGUYEN

IPC: G01B9/02 ,  G03F7/20

Abstract: Processing systems and methods used in the manufacturing of flat panel displays (FPDs) are provided herein. In one embodiment, a processing system features a motion stage movably disposed on a base surface, one or more X-position interferometers, and a plurality of Y-position interferometers. The X-position interferometers include an X-position mirror fixedly coupled to the motion stage and an X-axis stationary module fixedly coupled a non-moving surface of processing system. Each of the plurality of Y-position interferometers include one of a first or second Y-position mirror fixedly coupled to the motion stage in orthogonal relationship to the one or more X-position mirrors and one of a first or a second Y-axis stationary module fixedly coupled to a non-moving surface of the processing system. Here, each of the Y-axis stationary modules is positioned to direct coherent radiation towards a respective Y-position mirror when the Y-position interferometer thereof is in an active arrangement.