公开(公告)号：US20190299357A1

公开(公告)日：2019-10-03

申请号：US16442687

申请日：2019-06-17

Applicant: Applied Materials, Inc.

Inventor： Mahendra Christopher ORILALL ,  Timothy MICHAELSON ,  Kasiraman KRISHNAN ,  Rajeev BAJAJ ,  Nag B. PATIBANDLA ,  Daniel REDFIELD ,  Fred C. REDEKER ,  Gregory E. MENK

IPC: B24B37/24 ,  B24D18/00 ,  B24B37/26 ,  B24B37/22

Abstract: A method of fabricating a polishing layer of a polishing pad includes successively depositing a plurality of layers with a 3D printer, each layer of the plurality of polishing layers deposited by ejecting a base material from a first nozzle and an additive material from a second nozzle and solidifying the base and additive material to form a solidified pad material.

公开(公告)号：US20160107288A1

公开(公告)日：2016-04-21

申请号：US14885955

申请日：2015-10-16

Applicant: Applied Materials, Inc.

Inventor： Mahendra Christopher ORILALL ,  Timothy MICHAELSON ,  Kasiraman KRISHNAN ,  Rajeev BAJAJ ,  Nag B. PATIBANDLA ,  Daniel REDFIELD ,  Fred C. REDEKER ,  Gregory E. MENK

IPC: B24B37/24 ,  B24B37/26 ,  B24D18/00 ,  B24B37/22

CPC classification number: B24B37/24 ,  B24B37/22 ,  B24B37/26 ,  B24D18/0045 ,  B33Y10/00 ,  B33Y80/00

Abstract: A method of fabricating a polishing layer of a polishing pad includes successively depositing a plurality of layers with a 3D printer, each layer of the plurality of polishing layers deposited by ejecting a base material from a first nozzle and an additive material from a second nozzle and solidifying the base and additive material to form a solidified pad material.

Abstract translation: 制造抛光垫的抛光层的方法包括用3D打印机连续沉积多个层，通过从第一喷嘴喷射基材并从第二喷嘴排出添加剂材料沉积多个抛光层的每一层，以及 固化基材和添加剂材料以形成固化的垫材料。