公开(公告)号：US20220333989A1

公开(公告)日：2022-10-20

申请号：US17234940

申请日：2021-04-20

申请人： Applied Materials, Inc.

发明人： Blake Erickson ,  Keith Berding ,  Michael Kutney ,  Zhaozhao Zhu ,  Tsung Feng Wu ,  Michael D. Willwerth ,  Jeffrey Ludwig

IPC分类号： G01J3/32 ,  G01N21/25 ,  G01J3/02

摘要： An apparatus includes a base component and collimators housed within the base component. The collimators correspond to collection cylinders for sampling optical emission spectroscopy (OES) signals with respect to locations of a wafer in an etch chamber. The apparatus further includes a guide, operatively coupled to the plurality of collimators, to guide the sampling of the OES signals along paths for sampling the OES signals.

公开(公告)号：US20230258500A1

公开(公告)日：2023-08-17

申请号：US18138914

申请日：2023-04-25

申请人： Applied Materials, Inc.

发明人： Blake Erickson ,  Keith Berding ,  Michael Kutney ,  Zhaozhao Zhu ,  Tsung Feng Wu ,  Michael D. Willwerth ,  Jeffrey Ludwig

IPC分类号： G01J3/32 ,  G01J3/02 ,  G01N21/25 ,  G01N21/68 ,  G01N21/95

CPC分类号： G01J3/32 ,  G01J3/0291 ,  G01N21/255 ,  G01N21/68 ,  G01N21/9501

摘要： An apparatus includes a base component and a plurality of collimators housed within the base component. Each collimator of the plurality of collimators corresponds to a respective location of a plurality of locations of a wafer in an etch chamber. The plurality of locations includes a center location of the wafer, a plurality of inner ring locations along an inner ring of the wafer associated with a first set of radially symmetric optical emission spectroscopy (OES) signal sampling paths, and a plurality of outer ring locations along an outer ring of the wafer associated with a second set of radially symmetric OES signal sampling paths.

公开(公告)号：US11668602B2

公开(公告)日：2023-06-06

申请号：US17234940

申请日：2021-04-20

申请人： Applied Materials, Inc.

发明人： Blake Erickson ,  Keith Berding ,  Michael Kutney ,  Zhaozhao Zhu ,  Tsung Feng Wu ,  Michael D. Willwerth ,  Jeffrey Ludwig

IPC分类号： G01J3/32 ,  G01J3/02 ,  G01N21/25 ,  G01N21/68 ,  G01N21/95

CPC分类号： G01J3/32 ,  G01J3/0291 ,  G01N21/255 ,  G01N21/68 ,  G01N21/9501

摘要： An apparatus includes a base component and collimators housed within the base component. The collimators correspond to collection cylinders for sampling optical emission spectroscopy (OES) signals with respect to locations of a wafer in an etch chamber. The apparatus further includes a guide, operatively coupled to the plurality of collimators, to guide the sampling of the OES signals along paths for sampling the OES signals.