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公开(公告)号：US11264252B2
公开(公告)日：2022-03-01
申请号：US16561907
申请日：2019-09-05
摘要： Implementations described herein provide a chamber lid assembly. In one embodiment, a chamber lid assembly includes a heater embedded in a dielectric body forming a boundary of a processing chamber, wherein the heater has one or more heating zones that are independently controlled.
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公开(公告)号：US20220333989A1
公开(公告)日：2022-10-20
申请号：US17234940
申请日：2021-04-20
发明人： Blake Erickson , Keith Berding , Michael Kutney , Zhaozhao Zhu , Tsung Feng Wu , Michael D. Willwerth , Jeffrey Ludwig
摘要： An apparatus includes a base component and collimators housed within the base component. The collimators correspond to collection cylinders for sampling optical emission spectroscopy (OES) signals with respect to locations of a wafer in an etch chamber. The apparatus further includes a guide, operatively coupled to the plurality of collimators, to guide the sampling of the OES signals along paths for sampling the OES signals.
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3.发明申请CAPACITOR ASSEMBLIES FOR COUPLING RADIO FREQUENCY (RF) AND DIRECT CURRENT (DC) ENERGY TO ONE OR MORE COMMON ELECTRODES 有权用于将无线电频率（RF）和直流电（DC）耦合到一个或多个通用电极的电容器组件公开(公告)号：US20150294790A1
公开(公告)日：2015-10-15
申请号：US14249327
申请日：2014-04-09
摘要： Embodiments of a capacitor assembly for coupling radio frequency (RF) and direct current (DC) power to an electrode and substrate support incorporating same are provided herein. In some embodiments, the capacitor assembly includes a first conductive plate to receive RF power from an RF power source, the first conductive plate including a central bore; at least one capacitor coupled to the first conductive plate and surrounding the central bore; and a second conductive plate electrically coupled to the first conductive plate via the at least one capacitor, the second conductive plate including an input tap to receive DC power from a DC power source and at least one output tap to couple the RF and DC power to an electrode.
摘要翻译： 本文提供了一种用于将射频（RF）和直流（DC）功率耦合到电极的基座支架的结合实施例。 在一些实施例中，电容器组件包括用于从RF电源接收RF功率的第一导电板，第一导电板包括中心孔; 耦合到所述第一导电板并围绕所述中心孔的至少一个电容器; 以及第二导电板，其经由所述至少一个电容器电耦合到所述第一导电板，所述第二导电板包括输入抽头，以从DC电源接收DC电力，以及至少一个输出抽头将所述RF和DC功率耦合到 电极。
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公开(公告)号：US12068135B2
公开(公告)日：2024-08-20
申请号：US17175216
申请日：2021-02-12
发明人： Ming Xu , Ashley Mutsuo Okada , Michael D. Willwerth , Duc Dang Buckius , Jeffrey Ludwig , Aditi Mithun , Benjamin Schwarz
IPC分类号： H01J37/32 , H01L21/3065 , H01L21/67
CPC分类号： H01J37/32449 , H01L21/3065 , H01J2237/332 , H01J2237/334
摘要： A gas distribution apparatus is provided having a first reservoir with a first upstream end and a first downstream end and a second reservoir with a second upstream end and a second downstream end. A reservoir switch valve is in fluid communication with the first downstream end of the first reservoir and the second downstream end of the second reservoir. The reservoir switch valve operable to selectively couple the first reservoir to an outlet of the reservoir switch valve when in a first state, and couple the second reservoir to the outlet of the reservoir switch valve when in a second state. A plurality of proportional flow control valves are provided having inlets coupled in parallel to the outlet of the reservoir switch valve The plurality of proportional flow control valves have outlets configured to provide gas to a processing chamber.
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公开(公告)号：USD931240S1
公开(公告)日：2021-09-21
申请号：US29700012
申请日：2019-07-30
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公开(公告)号：US20230258500A1
公开(公告)日：2023-08-17
申请号：US18138914
申请日：2023-04-25
发明人： Blake Erickson , Keith Berding , Michael Kutney , Zhaozhao Zhu , Tsung Feng Wu , Michael D. Willwerth , Jeffrey Ludwig
CPC分类号： G01J3/32 , G01J3/0291 , G01N21/255 , G01N21/68 , G01N21/9501
摘要： An apparatus includes a base component and a plurality of collimators housed within the base component. Each collimator of the plurality of collimators corresponds to a respective location of a plurality of locations of a wafer in an etch chamber. The plurality of locations includes a center location of the wafer, a plurality of inner ring locations along an inner ring of the wafer associated with a first set of radially symmetric optical emission spectroscopy (OES) signal sampling paths, and a plurality of outer ring locations along an outer ring of the wafer associated with a second set of radially symmetric OES signal sampling paths.
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公开(公告)号：US11668602B2
公开(公告)日：2023-06-06
申请号：US17234940
申请日：2021-04-20
发明人： Blake Erickson , Keith Berding , Michael Kutney , Zhaozhao Zhu , Tsung Feng Wu , Michael D. Willwerth , Jeffrey Ludwig
CPC分类号： G01J3/32 , G01J3/0291 , G01N21/255 , G01N21/68 , G01N21/9501
摘要： An apparatus includes a base component and collimators housed within the base component. The collimators correspond to collection cylinders for sampling optical emission spectroscopy (OES) signals with respect to locations of a wafer in an etch chamber. The apparatus further includes a guide, operatively coupled to the plurality of collimators, to guide the sampling of the OES signals along paths for sampling the OES signals.
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8.发明授权Capacitor assemblies for coupling radio frequency (RF) and direct current (DC) energy to one or more common electrodes 有权用于将射频（RF）和直流（DC）能量耦合到一个或多个公共电极的电容器组件公开(公告)号：US09355776B2
公开(公告)日：2016-05-31
申请号：US14249327
申请日：2014-04-09
摘要： Embodiments of a capacitor assembly for coupling radio frequency (RF) and direct current (DC) power to an electrode and substrate support incorporating same are provided herein. In some embodiments, the capacitor assembly includes a first conductive plate to receive RF power from an RF power source, the first conductive plate including a central bore; at least one capacitor coupled to the first conductive plate and surrounding the central bore; and a second conductive plate electrically coupled to the first conductive plate via the at least one capacitor, the second conductive plate including an input tap to receive DC power from a DC power source and at least one output tap to couple the RF and DC power to an electrode.
摘要翻译： 本文提供了一种用于将射频（RF）和直流（DC）功率耦合到电极的基座支架的结合实施例。 在一些实施例中，电容器组件包括用于从RF电源接收RF功率的第一导电板，第一导电板包括中心孔; 耦合到所述第一导电板并围绕所述中心孔的至少一个电容器; 以及第二导电板，其经由所述至少一个电容器电耦合到所述第一导电板，所述第二导电板包括输入抽头，以从DC电源接收DC电力，以及至少一个输出抽头将所述RF和DC功率耦合到 电极。
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