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公开(公告)号：US20240098871A1
公开(公告)日：2024-03-21
申请号：US17949862
申请日：2022-09-21
Applicant: Applied Materials, Inc.
Inventor： Wai-Ming Tam , Klaus Becker , William Herron Park, JR. , Frank Sinclair
CPC classification number: H05H7/22 , H05H7/02 , H05H2007/025 , H05H2007/222
Abstract: An apparatus may include a drift tube assembly having a plurality of drift tubes to conduct an ion beam along a beam propagation direction. The plurality of drift tubes may define a multi-gap configuration corresponding to a plurality of acceleration gaps, wherein at least one powered drift tube of the drift tube assembly is coupled to receive an RF voltage signal. The apparatus may also include a DC electrode assembly that includes a conductor line, arranged within a resonator coil that is coupled to receive a DC voltage signal into the at least one powered drift tube. The DC electrode assembly may also include a DC electrode arrangement, connected to the conductor line and disposed within the at least one powered drift tube.
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公开(公告)号：US20220248523A1
公开(公告)日：2022-08-04
申请号：US17163251
申请日：2021-01-29
Applicant: Applied Materials, Inc.
Inventor： Frank Sinclair , Wai-Ming Tam , Costel Biloiu , William Davis Lee
IPC: H05H9/04 , H01J37/317 , H05H7/22 , H05H7/02
Abstract: An apparatus may include a drift tube assembly, the drift tube assembly defining a triple gap configuration, and arranged to accelerate and transmit an ion beam along abeam path. The apparatus may include a resonator, to output an RF signal to the drift tube assembly, and an RF quadrupole triplet, connected to the drift tube assembly, and arranged circumferentially around the beam path.
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公开(公告)号：US20240114613A1
公开(公告)日：2024-04-04
申请号：US17956192
申请日：2022-09-29
Applicant: Applied Materials, Inc.
Inventor： Wai-Ming Tam , Frank Sinclair
CPC classification number: H05H7/22 , H05H7/02 , H05H9/042 , H05H2007/025 , H05H2007/222
Abstract: An apparatus may include a drift tube assembly, comprising a plurality of drift tubes to conduct an ion beam along a beam propagation direction. The plurality of drift tubes may define a multi-gap configuration corresponding to a plurality of acceleration gaps, wherein the plurality of drift tubes further define a plurality of RF quadrupoles, respectively. As such, the plurality of quadrupoles are arranged to defocus the ion beam along a first direction at the plurality of acceleration gaps, respectively, where the first direction extends perpendicularly to the beam propagation direction.
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Patent Agency Ranking
4.发明申请公开(公告)号：US20230124350A1
公开(公告)日：2023-04-20
申请号：US17506185
申请日：2021-10-20
Applicant: Applied Materials, Inc.
Inventor： Costel Biloiu , David T. Blahnik , Wai-Ming Tam , Charles T. Carlson , Frank Sinclair
Abstract: An exciter for a high frequency resonator. The exciter may include an exciter coil inner portion, extending along an exciter axis, an exciter coil loop, disposed at a distal end of the exciter coil inner portion. The exciter may also include a drive mechanism, including at least a rotation component to rotate the exciter coil loop around the exciter axis.
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公开(公告)号：US12096548B2
公开(公告)日：2024-09-17
申请号：US17949862
申请日：2022-09-21
Applicant: Applied Materials, Inc.
Inventor： Wai-Ming Tam , Klaus Becker , William Herron Park, Jr. , Frank Sinclair
CPC classification number: H05H7/22 , H05H7/02 , H05H2007/025 , H05H2007/222
Abstract: An apparatus may include a drift tube assembly having a plurality of drift tubes to conduct an ion beam along a beam propagation direction. The plurality of drift tubes may define a multi-gap configuration corresponding to a plurality of acceleration gaps, wherein at least one powered drift tube of the drift tube assembly is coupled to receive an RF voltage signal. The apparatus may also include a DC electrode assembly that includes a conductor line, arranged within a resonator coil that is coupled to receive a DC voltage signal into the at least one powered drift tube. The DC electrode assembly may also include a DC electrode arrangement, connected to the conductor line and disposed within the at least one powered drift tube.
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6.发明授权公开(公告)号：US11812539B2
公开(公告)日：2023-11-07
申请号：US17506185
申请日：2021-10-20
Applicant: Applied Materials, Inc.
Inventor： Costel Biloiu , David T. Blahnik , Wai-Ming Tam , Charles T. Carlson , Frank Sinclair
CPC classification number: H05H7/02 , H05H7/12 , H05H9/00 , H05H2007/025
Abstract: An exciter for a high frequency resonator. The exciter may include an exciter coil inner portion, extending along an exciter axis, an exciter coil loop, disposed at a distal end of the exciter coil inner portion. The exciter may also include a drive mechanism, including at least a rotation component to rotate the exciter coil loop around the exciter axis.
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7.发明授权公开(公告)号：US12144101B2
公开(公告)日：2024-11-12
申请号：US18373128
申请日：2023-09-26
Applicant: Applied Materials, Inc.
Inventor： Costel Biloiu , David T. Blahnik , Wai-Ming Tam , Charles T. Carlson , Frank Sinclair
Abstract: An exciter for a high frequency resonator. The exciter may include an exciter coil inner portion, extending along an exciter axis, an exciter coil loop, disposed at a distal end of the exciter coil inner portion. The exciter may also include a drive mechanism, including at least a rotation component to rotate the exciter coil loop around the exciter axis.
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公开(公告)号：US11818830B2
公开(公告)日：2023-11-14
申请号：US17163251
申请日：2021-01-29
Applicant: Applied Materials, Inc.
Inventor： Frank Sinclair , Wai-Ming Tam , Costel Biloiu , William Davis Lee
IPC: H05H9/04 , H01J37/317 , H05H7/22 , H05H7/02
CPC classification number: H05H9/04 , H01J37/3171 , H05H7/02 , H05H7/22 , H01J2237/04732 , H05H2007/222 , H05H2007/227
Abstract: An apparatus may include a drift tube assembly, the drift tube assembly defining a triple gap configuration, and arranged to accelerate and transmit an ion beam along abeam path. The apparatus may include a resonator, to output an RF signal to the drift tube assembly, and an RF quadrupole triplet, connected to the drift tube assembly, and arranged circumferentially around the beam path.
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