Support pipe for an interlocking process kit for a substrate processing chamber

    公开(公告)号:USD1042374S1

    公开(公告)日:2024-09-17

    申请号:US29831299

    申请日:2022-03-18

    摘要: FIG. 1 is a top, front, right isometric view of a support pipe for an interlocking process kit for a substrate processing chamber, showing our new design.
    FIG. 2 is a bottom, left, back isometric view thereof.
    FIG. 3 is a top plan view thereof.
    FIG. 4 is a bottom plan view thereof.
    FIG. 5 is a front elevation view thereof.
    FIG. 6 is a back elevation view thereof.
    FIG. 7 is a right side elevation view thereof.
    FIG. 8 is a left side elevation view thereof; and,
    FIG. 9 is an enlarged cross-sectional view taken along line 9-9 in FIG. 3.
    The dashed lines in FIGS. 1-9 represent unclaimed environment and form no part of the claimed design.