公开(公告)号：US20200234418A1

公开(公告)日：2020-07-23

申请号：US16250980

申请日：2019-01-17

Applicant: Applied Materials Israel, Ltd.

Inventor： Haim FELDMAN ,  Eyal NEISTEIN ,  Harel ILAN ,  Shahar ARAD ,  Ido ALMOG

IPC: G06T7/00 ,  G06T7/11

Abstract: A method, system and computer readable medium for providing information about a region of a sample. The method includes (i) obtaining, by an imager, multiple images of the region; wherein the multiple images differ from each other by at least one parameter (ii) receiving or generating multiple reference images; (iii) generating multiple difference images that represent differences between the multiple images and the multiple reference images; (iv) calculating a set of region pixel attributes, (v) calculating a set of noise attributes, based on multiple sets of region pixels attributes of the multiple region pixels; and (vi) determining for each region pixel, whether the region pixel represents a defect based on a relationship between the set of noise attributes and the set of region pixel attributes of the pixel.

公开(公告)号：US20220237758A1

公开(公告)日：2022-07-28

申请号：US17160364

申请日：2021-01-27

Applicant: Applied Materials Israel Ltd.

Inventor： Guy SHWARTZ ,  Ido ALMOG

IPC: G06T7/00

Abstract: Disclosed is a computerized method for detecting defects on a sample. The method includes: (i) receiving scan data corresponding to a pixel on the sample; (ii) computing a difference vector d based on the scan data and corresponding reference data; (iii) computing a parameter D dependent on t=Γd−(Glinear/∥Γs∥2)Γs, wherein ΓTΓ=K−1 with K being a covariance matrix corresponding to the pixel, s is a predetermined kernel characterizing a defect signal, and Glinear=s·(K−1 d) is a gaussian approximation of a likelihood ratio test expression for distinguishing the defect signal from noise, and wherein D substantially monotonically increases with ∥t∥; and (iv) computing a score q(g, D) indicative of whether the pixel is defective, wherein g is a parameter indicative of a value of Glinear and q(g, D) substantially monotonically increases with g and substantially monotonically decreases with D.

公开(公告)号：US20220113129A1

公开(公告)日：2022-04-14

申请号：US17068693

申请日：2020-10-12

Applicant: Applied Materials Israel, Ltd.

Inventor： Ori GOLANI ,  Ido ALMOG

IPC: G01B11/22 ,  G01B11/06

Abstract: Disclosed herein is a method for depth-profiling of samples including a target region including a lateral structural feature. The method includes obtaining measured signals of the sample and analyzing thereof to obtain a depth-dependence of at least one parameter characterizing the lateral structural feature. The measured signals are obtained by repeatedly: projecting a pump pulse on the sample, thereby producing an acoustic pulse propagating within the target region; Brillouin-scattering a probe pulse off the acoustic pulse within the target region; and detecting a scattered component of the probe pulse to obtain a measured signal. In each repetition the respective probe pulse is scattered off the acoustic pulse at a respective depth within the target region, thereby probing the target region at a plurality of depths. A wavelength of the pump pulse is at least about two times greater than a lateral extent of the lateral structural feature

公开(公告)号：US20200232934A1

公开(公告)日：2020-07-23

申请号：US16746739

申请日：2020-01-17

Applicant: Applied Materials Israel, Ltd.

Inventor： Haim FELDMAN ,  Eyal NEISTEIN ,  Harel ILAN ,  Shahar ARAD ,  Ido ALMOG

IPC: G01N21/95 ,  G01N21/956

Abstract: Disclosed herein is a method for detecting defects on a sample. The method includes obtaining scan data of a region of a sample in a multiplicity of perspectives, and performing an integrated analysis of the obtained scan data. The integrated analysis includes computing, based on the obtained scan data, and/or estimating cross-perspective covariances, and determining presence of defects in the region, taking into account the cross-perspective covariances.