公开(公告)号：US20200234418A1

公开(公告)日：2020-07-23

申请号：US16250980

申请日：2019-01-17

Applicant: Applied Materials Israel, Ltd.

Inventor： Haim FELDMAN ,  Eyal NEISTEIN ,  Harel ILAN ,  Shahar ARAD ,  Ido ALMOG

IPC: G06T7/00 ,  G06T7/11

Abstract: A method, system and computer readable medium for providing information about a region of a sample. The method includes (i) obtaining, by an imager, multiple images of the region; wherein the multiple images differ from each other by at least one parameter (ii) receiving or generating multiple reference images; (iii) generating multiple difference images that represent differences between the multiple images and the multiple reference images; (iv) calculating a set of region pixel attributes, (v) calculating a set of noise attributes, based on multiple sets of region pixels attributes of the multiple region pixels; and (vi) determining for each region pixel, whether the region pixel represents a defect based on a relationship between the set of noise attributes and the set of region pixel attributes of the pixel.

公开(公告)号：US20230418081A1

公开(公告)日：2023-12-28

申请号：US17850940

申请日：2022-06-27

Applicant: Applied Materials Israel Ltd.

Inventor： Haim FELDMAN

IPC: G02B27/09

CPC classification number: G02B27/0961 ,  G02B27/0927 ,  G03F1/84

Abstract: A light source system is disclosed, the system comprises: a multimode laser unit; a first lenslet array positioned in a path of said laser beam and configured to form an array of focused spots in a selected plane downstream of said first lenslet array; a spatial filter mask carrying an array of pinholes positioned in said selected plane; a second lenslet array having spatial arrangement of lenslets similar to the first lenslet array and positioned such that said spatial filter mask is in a back focal plane of said second lenslet array, thereby collimating laser light from the array of focused spots into a corresponding array of beamlets; and a third lenslet array positioned downstream of said second lenslet array, configured for focusing said array of beamlets to form an output spot array at an exit pupil of said light source system.

公开(公告)号：US20250055241A1

公开(公告)日：2025-02-13

申请号：US18231221

申请日：2023-08-07

Applicant: Applied Materials Israel Ltd.

Inventor： Ron NAFTALI ,  Haim FELDMAN ,  Boris GOLBERG ,  Ram ORON

IPC: H01S3/00

Abstract: A pulse stretcher unit, and a respecting inspection system are disclosed. The pulse stretcher unit comprises a selected number of beam splitters arranged along a selected main path and comprising an input beam splitter, an output beam splitter and one or more intermediate beam splitters, and an arrangement of light reflecting surfaces defining a selected number of n auxiliary paths extending between said selected number of beam splitters. Wherein said selected number of beam splitters direct input beam between said selected main path and said selected number of auxiliary paths for splitting an input pulse into a series of pulses having generally equal amplitude. And wherein lengths of said auxiliary paths follow approximately a series of the form L/2k for k=0, 1, 2, where L is a selected length of an auxiliary path.

公开(公告)号：US20240255770A1

公开(公告)日：2024-08-01

申请号：US18104230

申请日：2023-01-31

Applicant: Applied Materials Israel Ltd.

Inventor： Boris GOLBERG ,  Haim FELDMAN ,  Avishai BARTOV ,  Ron NAFTALI

IPC: G02B27/28 ,  G01N21/88 ,  G01N21/95 ,  G02F1/13363

CPC classification number: G02B27/283 ,  G01N21/8806 ,  G01N21/95 ,  G02F1/13363 ,  G02B2207/117

Abstract: A polarizer system is described. The polarizer system comprises at least one polarization beam splitter, a polarization rotator, and a beam combiner. The at least one polarization beam splitter is positioned to receive input radiation beam and to split the input radiation beam directing a first beam portion having a first linear polarization orientation along a first path and a second beam portion having a second linear polarization orientation orthogonal to said first linear polarization orientation along a second path. The polarization rotator is located along said second path and configured to rotate polarization of said beam portion to be parallel to said first linear polarization orientation. The beam combiner is configured and positioned to combine said first and second beam portions to form a common beam having said first linear polarization orientation propagating along a selected optical path.

公开(公告)号：US20240280802A1

公开(公告)日：2024-08-22

申请号：US18405683

申请日：2024-01-05

Applicant: Applied Materials Israel Ltd.

Inventor： Boris GOLBERG ,  Haim FELDMAN ,  Ron NAFTALI

IPC: G02B26/04

CPC classification number: G02B26/04

Abstract: An illumination module of a wafer inspection system including: an illumination source providing ultraviolet illumination with wavelengths below 300 nm; a pulse cascader, optically coupled to the illumination source to receive the ultraviolet illumination, which pulse cascade including a chain of a plurality of loops, each loop including: a loop input and a loop output, a first loop output optically coupled to a loop input of a subsequent loop in the chain; and a delay line having: a delay line input optically coupled to the loop input; and a delay line output, the delay line configured to output a delay line light output, from the delay line output, including an image of light received at the delay line input, after a time delay from a time of receipt of light received at the delay line input; and a splitter configured to receive light at a splitter input and output a first portion of the light from the loop through a loop output and to pass a second portion of the light to the delay line input.

公开(公告)号：US20240280506A1

公开(公告)日：2024-08-22

申请号：US18409698

申请日：2024-01-10

Applicant: Applied Materials Israel Ltd.

Inventor： Elad EIZNER ,  Haim FELDMAN ,  Boris GOLBERG ,  Ron NAFTALI ,  Keith WELLS

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N2201/06113 ,  G01N2201/103

Abstract: Implementations disclosed describe, among other things, a sample inspection system that includes an illumination subsystem to illuminate a sample with a plurality of time-spaced light pulses generated, using a pulse multiplexing system, from a source light pulse. The pulse multiplexing system includes a plurality of optical loops, each deploying an optical coupler that outputs a first portion of incident light to a sample and provides a second portion of incident light as an input into the next optical loop. The sample inspection system further includes a collection subsystem to collect a portion of light generated upon interaction of the plurality of time-spaced light pulses with the sample, and a light detection subsystem to detect the collected portion of light.

公开(公告)号：US20200232934A1

公开(公告)日：2020-07-23

申请号：US16746739

申请日：2020-01-17

Applicant: Applied Materials Israel, Ltd.

Inventor： Haim FELDMAN ,  Eyal NEISTEIN ,  Harel ILAN ,  Shahar ARAD ,  Ido ALMOG

IPC: G01N21/95 ,  G01N21/956

Abstract: Disclosed herein is a method for detecting defects on a sample. The method includes obtaining scan data of a region of a sample in a multiplicity of perspectives, and performing an integrated analysis of the obtained scan data. The integrated analysis includes computing, based on the obtained scan data, and/or estimating cross-perspective covariances, and determining presence of defects in the region, taking into account the cross-perspective covariances.