公开(公告)号：US20200232934A1

公开(公告)日：2020-07-23

申请号：US16746739

申请日：2020-01-17

Applicant: Applied Materials Israel, Ltd.

Inventor： Haim FELDMAN ,  Eyal NEISTEIN ,  Harel ILAN ,  Shahar ARAD ,  Ido ALMOG

IPC: G01N21/95 ,  G01N21/956

Abstract: Disclosed herein is a method for detecting defects on a sample. The method includes obtaining scan data of a region of a sample in a multiplicity of perspectives, and performing an integrated analysis of the obtained scan data. The integrated analysis includes computing, based on the obtained scan data, and/or estimating cross-perspective covariances, and determining presence of defects in the region, taking into account the cross-perspective covariances.

公开(公告)号：US20200234418A1

公开(公告)日：2020-07-23

申请号：US16250980

申请日：2019-01-17

Applicant: Applied Materials Israel, Ltd.

Inventor： Haim FELDMAN ,  Eyal NEISTEIN ,  Harel ILAN ,  Shahar ARAD ,  Ido ALMOG

IPC: G06T7/00 ,  G06T7/11

Abstract: A method, system and computer readable medium for providing information about a region of a sample. The method includes (i) obtaining, by an imager, multiple images of the region; wherein the multiple images differ from each other by at least one parameter (ii) receiving or generating multiple reference images; (iii) generating multiple difference images that represent differences between the multiple images and the multiple reference images; (iv) calculating a set of region pixel attributes, (v) calculating a set of noise attributes, based on multiple sets of region pixels attributes of the multiple region pixels; and (vi) determining for each region pixel, whether the region pixel represents a defect based on a relationship between the set of noise attributes and the set of region pixel attributes of the pixel.