公开(公告)号：US20240339289A1

公开(公告)日：2024-10-10

申请号：US18131840

申请日：2023-04-06

Applicant: Applied Materials Israel Ltd.

Inventor： Adar Sonn-Segev ,  Gal Bruner

IPC: H01J37/147 ,  G06T3/40 ,  G06T7/33 ,  G06T7/38 ,  G06T7/593 ,  G06T7/73 ,  G06V10/25 ,  G06V20/50 ,  H01J37/22 ,  H01J37/28 ,  H01J37/305

CPC classification number: H01J37/1478 ,  G06T3/40 ,  G06T7/33 ,  G06T7/38 ,  G06T7/596 ,  G06T7/73 ,  G06V10/25 ,  G06V20/50 ,  H01J37/222 ,  H01J37/28 ,  H01J37/305 ,  G06T2207/10012 ,  G06T2207/10061 ,  G06T2207/30204 ,  H01J2237/2611 ,  H01J2237/2815 ,  H01J2237/31749

Abstract: A method of determining a depth of a hole milled into a first region of a sample, comprising: positioning the sample in a processing chamber having a charged particle beam column; milling a hole in the first region of the sample using a charged particle beam generated by the charged particle beam column; identifying a first registration mark at an upper level of the milled hole; identifying a second registration mark at a lower level of the milled hole; taking a first set of images at a first tilt angle, the first set of images including a first image taken with a field of view that captures the first registration mark but not the second registration mark, and a second image taken with a field of view that captures the second registration mark but not the first registration mark; taking a second set of images at a second tilt angle, different than the first tilt angle, the second set of images including a third image taken with a field of view that captures the first registration mark but not the second registration mark, and a fourth image taken with a field of view that captures the second registration mark but not the first registration mark; using stereoscopic measurement techniques to determine the depth of the hole based on the first and second sets of images.