公开(公告)号：US20190180975A1

公开(公告)日：2019-06-13

申请号：US15955467

申请日：2018-04-17

申请人： Applied Materials Israel Ltd.

发明人： Dror Shemesh ,  Uri Lev ,  Benjamin Colombeau ,  Amir Wachs ,  Kourosh Nafisi

IPC分类号： H01J37/22 ,  H01J37/28 ,  H01J37/244

CPC分类号： H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24475 ,  H01J2237/2804 ,  H01J2237/2813

摘要： A method for detecting crystal defects includes scanning a first FOV on a first sample using a charged particle beam with a plurality of different tilt angles. BSE emitted from the first sample are detected and a first image of the first FOV is created. A first area within the first image is identified where signals from the BSE are lower than other areas of the first image. A second FOV on a second sample is scanned using approximately the same tilt angles or deflections as those used to scan the first area. The BSE emitted from the second sample are detected and a second image of the second FOV is created. Crystal defects within the second sample are identified by identifying areas within the second image where signals from the BSE are different than other areas of the second image.

公开(公告)号：US10347462B2

公开(公告)日：2019-07-09

申请号：US15955467

申请日：2018-04-17

申请人： Applied Materials Israel Ltd.

发明人： Dror Shemesh ,  Uri Lev ,  Benjamin Colombeau ,  Amir Wachs ,  Kourosh Nafisi

IPC分类号： H01J37/22 ,  H01J37/28 ,  H01J37/244

摘要： A method for detecting crystal defects includes scanning a first FOV on a first sample using a charged particle beam with a plurality of different tilt angles. BSE emitted from the first sample are detected and a first image of the first FOV is created. A first area within the first image is identified where signals from the BSE are lower than other areas of the first image. A second FOV on a second sample is scanned using approximately the same tilt angles or deflections as those used to scan the first area. The BSE emitted from the second sample are detected and a second image of the second FOV is created. Crystal defects within the second sample are identified by identifying areas within the second image where signals from the BSE are different than other areas of the second image.