公开(公告)号：US10541104B2

公开(公告)日：2020-01-21

申请号：US14795793

申请日：2015-07-09

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Uri Lev ,  Alon Litman ,  Zvi Nir ,  Arnon Mizrahy

IPC: H01J37/28 ,  H01J37/147

Abstract: A method and a charged particle beam system that includes charged particle beam optics and a movable stage; wherein the movable stage is configured to introduce a movement between the object and charged particle beam optics; wherein the movement is of a constant velocity and along a first direction; wherein the charged particle beam optics is configured to scan, by the charged particle beam, multiple areas of the object so that each point of the multiple areas is scanned multiple times; wherein the multiple areas partially overlap; wherein the scanning is executed by the charged particle beam optics; wherein the scanning comprises performing counter-movement deflections of the charged particle beam for at least partially compensating for the movement; and wherein each area of the multiple areas is scanned by following an area scan scheme that defines multiple scan lines that differ from each other.

公开(公告)号：US20190180975A1

公开(公告)日：2019-06-13

申请号：US15955467

申请日：2018-04-17

Applicant: Applied Materials Israel Ltd.

Inventor： Dror Shemesh ,  Uri Lev ,  Benjamin Colombeau ,  Amir Wachs ,  Kourosh Nafisi

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/244

CPC classification number: H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24475 ,  H01J2237/2804 ,  H01J2237/2813

Abstract: A method for detecting crystal defects includes scanning a first FOV on a first sample using a charged particle beam with a plurality of different tilt angles. BSE emitted from the first sample are detected and a first image of the first FOV is created. A first area within the first image is identified where signals from the BSE are lower than other areas of the first image. A second FOV on a second sample is scanned using approximately the same tilt angles or deflections as those used to scan the first area. The BSE emitted from the second sample are detected and a second image of the second FOV is created. Crystal defects within the second sample are identified by identifying areas within the second image where signals from the BSE are different than other areas of the second image.

公开(公告)号：US10347462B2

公开(公告)日：2019-07-09

申请号：US15955467

申请日：2018-04-17

Applicant: Applied Materials Israel Ltd.

Inventor： Dror Shemesh ,  Uri Lev ,  Benjamin Colombeau ,  Amir Wachs ,  Kourosh Nafisi

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/244

Abstract: A method for detecting crystal defects includes scanning a first FOV on a first sample using a charged particle beam with a plurality of different tilt angles. BSE emitted from the first sample are detected and a first image of the first FOV is created. A first area within the first image is identified where signals from the BSE are lower than other areas of the first image. A second FOV on a second sample is scanned using approximately the same tilt angles or deflections as those used to scan the first area. The BSE emitted from the second sample are detected and a second image of the second FOV is created. Crystal defects within the second sample are identified by identifying areas within the second image where signals from the BSE are different than other areas of the second image.

公开(公告)号：US20170011883A1

公开(公告)日：2017-01-12

申请号：US14795793

申请日：2015-07-09

Applicant: Applied Materials Israel, Ltd.

Inventor： Uri Lev ,  Alon Litman ,  Zvi Nir ,  Arnon Mizrahy

IPC: H01J37/28 ,  H01J37/20

Abstract: A method and a charged particle beam system that includes charged particle beam optics and a movable stage; wherein the movable stage is configured to introduce a movement between the object and charged particle beam optics; wherein the movement is of a constant velocity and along a first direction; wherein the charged particle beam optics is configured to scan, by the charged particle beam, multiple areas of the object so that each point of the multiple areas is scanned multiple times; wherein the multiple areas partially overlap; wherein the scanning is executed by the charged particle beam optics; wherein the scanning comprises performing counter-movement deflections of the charged particle beam for at least partially compensating for the movement; and wherein each area of the multiple areas is scanned by following an area scan scheme that defines multiple scan lines that differ from each other.

Abstract translation: 一种包括带电粒子束光学器件和可动载物台的方法和带电粒子束系统; 其中所述可移动台被配置为引入所述物体和带电粒子束光学器件之间的运动; 其中所述运动具有恒定的速度并沿着第一方向; 其中所述带电粒子束光学器件被配置为通过所述带电粒子束来扫描所述物体的多个区域，使得所述多个区域中的每个点被多次扫描; 其中所述多个区域部分重叠; 其中扫描由带电粒子束光学器件执行; 其中所述扫描包括执行所述带电粒子束的反向偏移以至少部分补偿所述运动; 并且其中通过遵循定义多个彼此不同的扫描线的区域扫描方案来扫描多个区域中的每个区域。