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公开(公告)号：US11810765B2
公开(公告)日：2023-11-07
申请号：US17129747
申请日：2020-12-21
发明人： Asaf Gutman , Irit Ruach-Nir , Kfir Luria , Sven Ruhle , Guy Eytan
CPC分类号： H01J37/32449 , C23C14/0042 , C23C14/0063 , C23C16/4405 , F16K3/04 , F16K3/085 , F16K3/32 , F16K3/34 , H01J37/3244 , H01J37/32513 , H01J37/32623 , H01J37/32862
摘要： A reactive particles supply system that may include an adjustable gas supply unit that is arranged to supply gas and to set a gas condition, a reactive particles supply unit that may be arranged to receive the gas, and an adjustable reactive particles output unit that may include a reactive particles input, a second reactive particles output, and a reactive particles path. The second reactive particles output is configured to output reactive particles towards an opening of a vacuumed chamber. The adjustable reactive particles output unit is arranged to mechanically configure at least one element of the reactive particles path according to the reactive particles condition.
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公开(公告)号：US20220199370A1
公开(公告)日：2022-06-23
申请号：US17129747
申请日：2020-12-21
发明人： Asaf Gutman , Irit Ruach-Nir , Kfir Luria , Sven Ruhle , Guy Eytan
IPC分类号： H01J37/32
摘要： A reactive particles supply system that may include an adjustable gas supply unit that is arranged to supply gas and to set a gas condition, a reactive particles supply unit that may be arranged to receive the gas, and an adjustable reactive particles output unit that may include a reactive particles input, a second reactive particles output, and a reactive particles path. The second reactive particles output is configured to output reactive particles towards an opening of a vacuumed chamber. The adjustable reactive particles output unit is arranged to mechanically configure at least one element of the reactive particles path according to the reactive particles condition.
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