公开(公告)号：US20190079022A1

公开(公告)日：2019-03-14

申请号：US15703937

申请日：2017-09-13

Applicant: Applied Materials Israel Ltd.

Inventor： Saar SHABTAY ,  Moshe AMZALEG ,  Zvi GOREN

IPC: G01N21/88 ,  G06T7/00 ,  G01N21/95

CPC classification number: G01N21/8803 ,  G01N21/8851 ,  G01N21/9501 ,  G01N2021/8461 ,  G01N2021/8867 ,  G06T7/0004 ,  G06T7/0006 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: Examination system, method and computer-readable medium, the method comprising: processing by a processor using a first recipe at least one image comprised in images and metadata generated by an inspection tool and stored, to detect a first location set of first potential defects and attributes thereof; selecting and imaging part of the first location set with a review tool to obtain an image set; obtaining classification results of said first potential defects and determining a further recipe based thereon; processing the image using the further recipe for detecting a further location set of further defects; selecting part of the further location set; imaging the part with the review tool to obtain a further image set, and obtaining further classification results; and repeating determining the further recipe, processing the image, selecting and imaging part of the further location set, and obtaining further classification results, until a stopping criteria is met.

公开(公告)号：US20190391085A1

公开(公告)日：2019-12-26

申请号：US16553946

申请日：2019-08-28

Applicant: Applied Materials Israel Ltd.

Inventor： Saar SHABTAY ,  Moshe AMZALEG ,  Zvi GOREN

IPC: G01N21/88 ,  G06T7/00 ,  G01N21/95

Abstract: Inspection data that corresponds to potential defects of an object may be received. A first set of locations of first potential defects can be identified. The first set of locations of the first potential defects can be imaged with a review tool to obtain a first set of review images. The first potential defects can be classified based on the first set of review images to obtain first classification results of the first potential defects. A determination can be made as to whether an examination stopping criteria has been satisfied. In response to determining that the examination stopping criteria has not been satisfied, a second set of locations of second potential defects can be identified to be imaged with the review tool to obtain a second set of review images. The second set of locations can be different than the first set of locations.

公开(公告)号：US20210239623A1

公开(公告)日：2021-08-05

申请号：US16782005

申请日：2020-02-04

Applicant: Applied Materials Israel Ltd.

Inventor： Yotam SOFER ,  Shaul ENGLER ,  Boaz COHEN ,  Saar SHABTAY ,  Amir BAR ,  Marcelo Gabriel BACHER

IPC: G01N21/88

Abstract: A system, method and computer readable medium for examining a specimen, the method comprising: obtaining defects of interest (DOIs) and false alarms (FAs) from a review subset selected from a group of potential defects received from an inspection tool, each potential defect is associated with attribute values defining a location of the potential defect in an attribute space; generating a representative subset of the group, comprising potential defects selected in accordance with a distribution of the potential defects within the attribute space, and indicating the potential defects in the representative subset as FA; and upon training a classifier using data informative of the attribute values of the DOIs, the potential defects of the representative subset, and respective indications thereof as DOIs or FAs, applying the classifier to at least some of the potential defects to obtain an estimation of a number of expected DOIs in the specimen.