公开(公告)号：US09235885B2

公开(公告)日：2016-01-12

申请号：US13756399

申请日：2013-01-31

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Nir Ben David Dodzin ,  Vered Gatt ,  Yair Hanani ,  Efrat Rozenman

IPC: G06T7/00 ,  G01N21/956 ,  H01L21/66

CPC classification number: G06T7/001 ,  G01N21/95607 ,  G01N2021/95615 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01L22/12

Abstract: A system capable of inspecting an article for defects, the system including: a patch comparator, configured to determine with respect to each of a plurality of reference patches in a reference image a similarity level, based on a predefined patch-similarity criterion and on a source patch defined in the reference image; an evaluation module, configured to rate each inspected pixel out of multiple inspected pixels of the inspection image with a representative score which is based on the similarity level of a reference patch associated with a reference pixel corresponding to the inspected pixel; a selection module, configured to select multiple selected inspected pixels based on the representative scores of the multiple inspected pixels; and a defect detection module, configured to determine a presence of a defect in the candidate pixel based on an inspected value of the candidate pixel and inspected values of the selected inspected pixels.

Abstract translation: 一种能够检查物品的缺陷的系统，所述系统包括：补丁比较器，被配置为基于预定的补丁相似性准则，在参考图像中确定相关性级别中的多个参考补丁中的每一个，并且基于 参考图片中定义的源补丁; 评估模块，其被配置为使用基于与对应于被检查像素的参考像素相关联的参考块的相似度级别的代表性分数对所述检查图像的多个被检查像素中的每个被检查像素进行评估; 选择模块，被配置为基于所述多个被检查像素的代表性分数来选择多个选择的被检查像素; 以及缺陷检测模块，被配置为基于候选像素的检查值和所选择的被检查像素的检查值来确定候选像素中的缺陷的存在。