公开(公告)号：US11107207B2

公开(公告)日：2021-08-31

申请号：US16533737

申请日：2019-08-06

Applicant: Applied Materials Israel Ltd.

Inventor： Elad Cohen ,  Yuri Feigin ,  Lior Katz ,  Eyal Neistein

IPC: G06T7/00 ,  G06T7/70

Abstract: A method and system for detecting defects in a specimen, the method comprising: obtaining an image comprising a plurality of pixels of a specimen part; processing the image according to a detection recipe to derive information related to potential defects in the specimen, the information comprising a first data set informative of first locations identified, in accordance with the detection recipe as locations of potential defects, and a second data set informative of second locations not identified as locations of potential defects; receiving data specifying targeted locations of interest within the part of the specimen; when the first data set is not informative of each targeted location, generating a third data set by adding to the first data set information related to the missing targeted location from the second data set, the information bearing an indication that it corresponds to a targeted location; and outputting the third data set.

公开(公告)号：US11386539B2

公开(公告)日：2022-07-12

申请号：US16425859

申请日：2019-05-29

Applicant: Applied Materials Israel Ltd.

Inventor： Elad Cohen ,  Yuri Feigin ,  Lior Katz ,  Eyal Neistein

IPC: G06T7/00 ,  H01L21/67

Abstract: A system and method for specimen examination, the system comprising a processing and memory circuitry (PMC) for: obtaining an image of at least a part of a specimen, the image acquired by an examination tool; receiving one or more characteristics of a defect of interest and a location of interest associated therewith; modifying within the image one or more pixels corresponding to the location of interest, wherein the modification is provided in accordance with a characteristic of the defect of interest, thereby planting the defect of interest into the image; processing the modified image to detect locations of potential defects of the specimen in accordance with a detection recipe; and determining whether the detected locations include the location of interest. Subject to the location of interest not being detected, modifying the detection recipe to enable detecting the planted defect of interest at the location of interest.