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公开(公告)号：US09382113B2
公开(公告)日：2016-07-05
申请号：US14070732
申请日：2013-11-04
发明人： Jer-Wei Hsieh , Han-Tang Su
CPC分类号： B81C1/00603 , B81B2201/042 , B81B2203/0136 , B81C1/0015 , G02B26/0833
摘要： In a method for fabricating a self-aligned vertical comb drive structure, a multi-layer structure is first formed. The multi-layer structure includes inter-digitated first and second comb structures formed via etching using a first mask layer as a mask. The first comb structure includes a plurality of first comb fingers, each having a first finger portion formed in a first device layer and a second finger portion formed in a second device layer and separated from the first finger portion by a self-aligned pattern on a stop layer. The second comb structure includes a plurality of second comb fingers formed solely in the second device layer. The second finger portions of the first comb fingers are subsequently removed.
摘要翻译： 在制造自对准垂直梳状驱动结构的方法中，首先形成多层结构。 多层结构包括使用第一掩模层作为掩模通过蚀刻形成的经数字化的第一和第二梳状结构。 第一梳结构包括多个第一梳指，每个第一梳指具有形成在第一器件层中的第一指部和形成在第二器件层中的第二指部，并且在第一器件层上分离自对准图案 停止层。 第二梳结构包括仅在第二器件层中形成的多个第二梳指。 随后去除第一梳齿的第二手指部分。
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公开(公告)号：US20140126031A1
公开(公告)日：2014-05-08
申请号：US14070732
申请日：2013-11-04
发明人： Jer-Wei Hsieh , Han-Tang Su
CPC分类号： B81C1/00603 , B81B2201/042 , B81B2203/0136 , B81C1/0015 , G02B26/0833
摘要： In a method for fabricating a self-aligned vertical comb drive structure, a multi-layer structure is first formed. The multi-layer structure includes inter-digitated first and second comb structures formed via etching using a first mask layer as a mask. The first comb structure includes a plurality of first comb fingers, each having a first finger portion formed in a first device layer and a second finger portion formed in a second device layer and separated from the first finger portion by a self-aligned pattern on a stop layer. The second comb structure includes a plurality of second comb fingers formed solely in the second device layer. The second finger portions of the first comb fingers are subsequently removed.
摘要翻译： 在制造自对准垂直梳状驱动结构的方法中，首先形成多层结构。 多层结构包括使用第一掩模层作为掩模通过蚀刻形成的经数字化的第一和第二梳状结构。 第一梳结构包括多个第一梳指，每个第一梳指具有形成在第一器件层中的第一指部和形成在第二器件层中的第二指部，并且在第一器件层上分离自对准图案 停止层。 第二梳结构包括仅在第二器件层中形成的多个第二梳指。 随后去除第一梳齿的第二手指部分。
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