公开(公告)号：US10156489B2

公开(公告)日：2018-12-18

申请号：US15414956

申请日：2017-01-25

申请人： Asia Pacific Microsystems, Inc.

发明人： Hung-Lin Yin ,  Cheng-Yi Chiang ,  Yu-Che Huang

IPC分类号： G01L9/00 ,  G01L9/06

摘要： A piezoresistive pressure sensor includes a substrate and a silicon device layer. The substrate has a cavity. The silicon device layer includes a diaphragm and a support element. A top surface of the diaphragm is connected to a top surface of the support element by one or more side surfaces. A recess of the silicon device layer is defined by the top surface of the diaphragm and the one or more side surfaces. A plurality of piezoresistive regions are on the top surface of the diaphragm, on the one or more side surfaces and on the top surface of the support element. A plurality of conductive regions are on the top surface of the support element. The plurality of conductive regions do not extend to the top surface of the diaphragm. The plurality of piezoresistive regions have a first ion dosage concentration. The plurality of conductive regions have a second ion dosage concentration. The second ion dosage concentration is greater than the first ion dosage concentration.

公开(公告)号：US20170219449A1

公开(公告)日：2017-08-03

申请号：US15414956

申请日：2017-01-25

申请人： Asia Pacific Microsystems, Inc.

发明人： Hung-Lin Yin ,  Cheng-Yi Chiang ,  Yu-Che Huang

IPC分类号： G01L9/00 ,  G01L9/06

CPC分类号： G01L9/0044 ,  G01L9/0047 ,  G01L9/0055 ,  G01L9/06

摘要： A piezoresistive pressure sensor includes a substrate and a silicon device layer. The substrate has a cavity. The silicon device layer includes a diaphragm and a support element. A top surface of the diaphragm is connected to a top surface of the support element by one or more side surfaces. A recess of the silicon device layer is defined by the top surface of the diaphragm and the one or more side surfaces. A plurality of piezoresistive regions are on the top surface of the diaphragm, on the one or more side surfaces and on the top surface of the support element. A plurality of conductive regions are on the top surface of the support element. The plurality of conductive regions do not extend to the top surface of the diaphragm. The plurality of piezoresistive regions have a first ion dosage concentration. The plurality of conductive regions have a second ion dosage concentration. The second ion dosage concentration is greater than the first ion dosage concentration.

公开(公告)号：US09676609B2

公开(公告)日：2017-06-13

申请号：US15144896

申请日：2016-05-03

申请人： Asia Pacific Microsystems, Inc.

发明人： Jerwei Hsieh

IPC分类号： H01L21/4763 ,  B81B7/00 ,  B81C1/00

CPC分类号： B81B7/0038 ,  B81B7/0058 ,  B81B2201/032 ,  B81C1/00238 ,  B81C1/00817 ,  B81C1/00825 ,  B81C2201/053 ,  B81C2201/056 ,  B81C2203/0785

摘要： An integrated MEMS device is provided. The integrated MEMS device comprises a circuit chip and a device chip. The circuit chip has a patterned first bonding layer disposed thereon, the bonding layer being composed of a conductive material/materials. The device chip has a first structural layer and a second structural layer, the first structural layer being connected to the second structural layer and the first bonding layer of the circuit chip, and being sandwiched between the second structural layer and the circuit chip. A plurality of hermetic spaces are enclosed by the first structural layer, the second structural layer, the first bonding layer and the circuit chip.

公开(公告)号：US09382113B2

公开(公告)日：2016-07-05

申请号：US14070732

申请日：2013-11-04

申请人： Asia Pacific Microsystems, Inc.

发明人： Jer-Wei Hsieh ,  Han-Tang Su

IPC分类号： G02B26/08 ,  B81C1/00

CPC分类号： B81C1/00603 ,  B81B2201/042 ,  B81B2203/0136 ,  B81C1/0015 ,  G02B26/0833

摘要： In a method for fabricating a self-aligned vertical comb drive structure, a multi-layer structure is first formed. The multi-layer structure includes inter-digitated first and second comb structures formed via etching using a first mask layer as a mask. The first comb structure includes a plurality of first comb fingers, each having a first finger portion formed in a first device layer and a second finger portion formed in a second device layer and separated from the first finger portion by a self-aligned pattern on a stop layer. The second comb structure includes a plurality of second comb fingers formed solely in the second device layer. The second finger portions of the first comb fingers are subsequently removed.

摘要翻译： 在制造自对准垂直梳状驱动结构的方法中，首先形成多层结构。 多层结构包括使用第一掩模层作为掩模通过蚀刻形成的经数字化的第一和第二梳状结构。 第一梳结构包括多个第一梳指，每个第一梳指具有形成在第一器件层中的第一指部和形成在第二器件层中的第二指部，并且在第一器件层上分离自对准图案 停止层。 第二梳结构包括仅在第二器件层中形成的多个第二梳指。 随后去除第一梳齿的第二手指部分。

公开(公告)号：US20150279664A1

公开(公告)日：2015-10-01

申请号：US14670875

申请日：2015-03-27

申请人： Asia Pacific Microsystems, Inc.

发明人： Hung-Lin Yin

IPC分类号： H01L21/02 ,  H01L21/461 ,  H01L21/78 ,  H01L23/00

CPC分类号： H01L21/02255 ,  B81C1/00047 ,  B81C2201/019 ,  H01L21/02554 ,  H01L21/187 ,  H01L21/461 ,  H01L21/78 ,  H01L24/03 ,  H01L24/05 ,  H01L24/06 ,  H01L24/08 ,  H01L24/09 ,  H01L24/80 ,  H01L24/92 ,  H01L2224/0355 ,  H01L2224/05551 ,  H01L2224/05638 ,  H01L2224/05686 ,  H01L2224/08145 ,  H01L2224/09181 ,  H01L2224/80006 ,  H01L2224/80013 ,  H01L2224/80894 ,  H01L2224/80896 ,  H01L2224/92 ,  H01L2224/9202 ,  H01L2224/94 ,  H01L2924/01014 ,  H01L2924/05442 ,  H01L2924/00012 ,  H01L2224/80 ,  H01L2221/68381 ,  H01L21/306 ,  H01L2224/03

摘要： The present disclosure provides a method for fabricating semiconductor devices having high-precision gaps. The method includes steps of providing a first wafer; forming two or more regions having various ion dosage concentrations on a first surface of the first wafer; thermally oxidizing the first wafer so as to grow oxide layers with various thicknesses on the first surface of the first wafer; and bonding a second wafer to the thickest oxide layer of the first wafer so as to form one or more gaps.

摘要翻译： 本公开提供了一种制造具有高精度间隙的半导体器件的方法。 该方法包括提供第一晶片的步骤; 在所述第一晶片的第一表面上形成具有各种离子剂量浓度的两个或更多个区域; 热氧化第一晶片以在第一晶片的第一表面上生长具有各种厚度的氧化物层; 以及将第二晶片接合到所述第一晶片的最厚氧化物层，以形成一个或多个间隙。

公开(公告)号：US08916449B2

公开(公告)日：2014-12-23

申请号：US13836807

申请日：2013-03-15

申请人： Asia Pacific Microsystems, Inc.

发明人： Hung-Lin Yin ,  Jerwei Hsieh ,  Li-Yuan Lin

IPC分类号： H01L21/30 ,  H01L21/46 ,  H01L23/498 ,  H01L21/762 ,  H01L23/10 ,  H01L21/50 ,  H01L23/00 ,  H01L25/065 ,  H01L25/00 ,  B81C1/00

CPC分类号： H01L23/49866 ,  B81C1/00269 ,  B81C2203/019 ,  H01L21/50 ,  H01L21/76251 ,  H01L23/10 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L24/27 ,  H01L24/29 ,  H01L24/32 ,  H01L24/48 ,  H01L24/73 ,  H01L24/81 ,  H01L24/83 ,  H01L24/92 ,  H01L24/95 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/0347 ,  H01L2224/03614 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05073 ,  H01L2224/05166 ,  H01L2224/05171 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/1145 ,  H01L2224/11462 ,  H01L2224/1147 ,  H01L2224/11614 ,  H01L2224/1308 ,  H01L2224/13082 ,  H01L2224/13111 ,  H01L2224/13139 ,  H01L2224/16148 ,  H01L2224/16238 ,  H01L2224/16503 ,  H01L2224/16507 ,  H01L2224/2745 ,  H01L2224/27462 ,  H01L2224/2747 ,  H01L2224/27614 ,  H01L2224/29011 ,  H01L2224/2908 ,  H01L2224/29082 ,  H01L2224/29084 ,  H01L2224/29111 ,  H01L2224/29139 ,  H01L2224/32146 ,  H01L2224/32148 ,  H01L2224/32235 ,  H01L2224/32238 ,  H01L2224/32503 ,  H01L2224/32507 ,  H01L2224/48091 ,  H01L2224/48148 ,  H01L2224/48228 ,  H01L2224/48463 ,  H01L2224/73103 ,  H01L2224/73203 ,  H01L2224/73215 ,  H01L2224/81011 ,  H01L2224/81013 ,  H01L2224/81022 ,  H01L2224/81121 ,  H01L2224/81193 ,  H01L2224/81203 ,  H01L2224/81825 ,  H01L2224/81948 ,  H01L2224/83011 ,  H01L2224/83013 ,  H01L2224/83022 ,  H01L2224/83121 ,  H01L2224/83193 ,  H01L2224/83203 ,  H01L2224/83805 ,  H01L2224/83825 ,  H01L2224/83948 ,  H01L2224/9202 ,  H01L2224/92147 ,  H01L2224/95 ,  H01L2924/00014 ,  H01L2924/01322 ,  H01L2924/1461 ,  H01L2924/15787 ,  H01L2924/16235 ,  H01L2924/351 ,  H01L2924/00015 ,  H01L2224/83 ,  H01L2224/85 ,  H01L2224/81 ,  H01L2924/00012 ,  H01L2924/00 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

摘要： A substrate bonding method comprises the following steps. Firstly, a first substrate and a second substrate are provided, wherein a surface of the first substrate is covered by a first Ag layer and a surface of the second substrate is covered by a second Ag layer and a metallic layer from bottom to top, wherein the metallic layer comprises a first Sn layer. Secondly, a bonding process is performed by aligning the first and second substrates followed by bringing the metallic layer into contact with the first Ag layer followed by applying a load while heating to a predetermined temperature in order to form Ag3Sn intermetallic compounds. Finally, cool down and remove the load to complete the bonding process.

摘要翻译： 基板接合方法包括以下步骤。 首先，提供第一基板和第二基板，其中第一基板的表面被第一Ag层覆盖，并且第二基板的表面被从第二Ag层和从底部到顶部的金属层覆盖，其中 金属层包括第一Sn层。 其次，通过使第一和第二基板对准，然后使金属层与第一Ag层接触，然后在加热至预定温度的同时施加负载以形成Ag 3 Sn金属间化合物，进行接合工艺。 最后，冷却并清除负载以完成粘合过程。

公开(公告)号：US20130205899A1

公开(公告)日：2013-08-15

申请号：US13764780

申请日：2013-02-11

申请人： Asia Pacific Microsystems, Inc.

发明人： Chang-Wen Wu ,  Jerwei Hsieh ,  Wu-Chen Yeh ,  Hung-Lin Yin ,  Huai-Wei Hsi

IPC分类号： G01P1/00

CPC分类号： G01P1/00 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/0264 ,  B81B2201/0278 ,  G01P15/0802 ,  G01P15/123

摘要： A combo transducer includes a base, a proof mass, a membrane unit and a plurality of transducing components. The base is formed with an aperture. The proof mass is disposed in the aperture and has a surface that is formed with a cavity. The membrane unit includes a supporting part connected to the base, a covering part disposed to cover the surface of the proof mass, and a resilient linking part interconnecting the supporting part and the covering part such that the proof mass is movable relative to the base. The transducing components are disposed at the membrane unit. At least one of the transducing components is disposed at the covering part and is registered with the cavity.

摘要翻译： 组合传感器包括基座，检测质量块，膜单元和多个换能元件。 基座形成有孔。 检测体设置在孔中，并具有形成有空腔的表面。 膜单元包括连接到基座的支撑部分，设置成覆盖防弹块表面的覆盖部分和将支撑部分和覆盖部分互连的弹性连接部分，使得证明物质可相对于基部移动。 传感组件设置在膜单元处。 至少一个转换部件设置在覆盖部分并且与空腔配准。

公开(公告)号：US20040240779A1

公开(公告)日：2004-12-02

申请号：US10448392

申请日：2003-05-30

申请人： Asia Pacific Microsystems, Inc.

发明人： Jer-Liang A. Yeh ,  Chih-Chung Chen ,  Yen-Jyh Lai ,  Wen-Chih Chen ,  Chengkuo Lee

IPC分类号： G02B006/26

CPC分类号： G02B6/353 ,  G02B6/3546 ,  G02B6/3552 ,  G02B6/3568 ,  G02B6/3584

摘要： Disclosed is a retro-reflective type optical signal processing device and method, particularly to a device includes a set of optical mirror planes with retro-reflective type layout and configuration, and a set of micro-shutters controlled by microelectromechanical actuators, whereas the optical signals in propagation can be blocked or partially blocked in terms of the position of said a set of micro-shutters corresponding to the optical signal transmission path, thereby the method of said approach to determine the range of attenuated optical signal is a variable optical attenuation function demonstrated by present invention. Such a retro-reflective type optical signal processing device and method further comprises a set of three reflective mirrors and micro-shutters with reflective mirrors. Thereby this device has the capability to switch 2 sets of retro-reflected optical light transmission paths, the method of said approach is a demonstration of 2null2 optical switching function.

摘要翻译： 公开了一种逆反射型光信号处理装置和方法，特别涉及一种装置，包括具有回射型布局和配置的一组光学镜面，以及由微机电致动器控制的一组微快门，而光信号 就所述一组微光闸对应于光信号传输路径的位置而言，传播可被阻挡或部分阻塞，因此所述确定衰减光信号范围的方法是示出的可变光衰减函数 通过本发明。 这种回射型光信号处理装置和方法还包括一组具有反射镜的三个反射镜和微快门。 因此，该装置具有切换2组反射光传输路径的能力，所述方法的方法是2x2光切换功能的演示。

公开(公告)号：US20040036569A1

公开(公告)日：2004-02-26

申请号：US10223362

申请日：2002-08-20

申请人： Asia Pacific Microsystems, Inc.

发明人： Shu-Hui Tsai ,  Shang-Yu Liang ,  Chun-Hsien Lee

IPC分类号： H01F005/00

CPC分类号： H01F17/0033 ,  H01F41/042 ,  H01L27/08 ,  Y10T29/4902

摘要： A three dimensional adjustable high frequency inductor, its module and fabrication method of the same; the high frequency module comprises micro high frequency inductors, filters, resistors, capacitors and associated with active components or power components to form a hybrid circuit, then it is packaged by using the technology of flip chip or wafer level packaging, so as to upgrade properties of high frequency modules and reduce the packaging and instrumentation costs by minimizing the modular size.

摘要翻译： 三维可调高频电感器，其模块和制造方法相同; 高频模块包括微型高频电感器，滤波器，电阻器，电容器，并与有源元件或功率元件相关联以形成混合电路，然后通过使用倒装芯片或晶圆级封装的技术进行封装，从而提高性能 的高频模块，并通过最小化模块化尺寸来降低封装和仪器成本。

公开(公告)号：US20130285248A1

公开(公告)日：2013-10-31

申请号：US13836807

申请日：2013-03-15

申请人： ASIA PACIFIC MICROSYSTEMS, INC.

发明人： Hung-Lin Yin ,  Jerwei Hsieh ,  Li-Yuan Lin

IPC分类号： H01L23/498 ,  H01L21/762

CPC分类号： H01L23/49866 ,  B81C1/00269 ,  B81C2203/019 ,  H01L21/50 ,  H01L21/76251 ,  H01L23/10 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L24/27 ,  H01L24/29 ,  H01L24/32 ,  H01L24/48 ,  H01L24/73 ,  H01L24/81 ,  H01L24/83 ,  H01L24/92 ,  H01L24/95 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/0347 ,  H01L2224/03614 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05073 ,  H01L2224/05166 ,  H01L2224/05171 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/1145 ,  H01L2224/11462 ,  H01L2224/1147 ,  H01L2224/11614 ,  H01L2224/1308 ,  H01L2224/13082 ,  H01L2224/13111 ,  H01L2224/13139 ,  H01L2224/16148 ,  H01L2224/16238 ,  H01L2224/16503 ,  H01L2224/16507 ,  H01L2224/2745 ,  H01L2224/27462 ,  H01L2224/2747 ,  H01L2224/27614 ,  H01L2224/29011 ,  H01L2224/2908 ,  H01L2224/29082 ,  H01L2224/29084 ,  H01L2224/29111 ,  H01L2224/29139 ,  H01L2224/32146 ,  H01L2224/32148 ,  H01L2224/32235 ,  H01L2224/32238 ,  H01L2224/32503 ,  H01L2224/32507 ,  H01L2224/48091 ,  H01L2224/48148 ,  H01L2224/48228 ,  H01L2224/48463 ,  H01L2224/73103 ,  H01L2224/73203 ,  H01L2224/73215 ,  H01L2224/81011 ,  H01L2224/81013 ,  H01L2224/81022 ,  H01L2224/81121 ,  H01L2224/81193 ,  H01L2224/81203 ,  H01L2224/81825 ,  H01L2224/81948 ,  H01L2224/83011 ,  H01L2224/83013 ,  H01L2224/83022 ,  H01L2224/83121 ,  H01L2224/83193 ,  H01L2224/83203 ,  H01L2224/83805 ,  H01L2224/83825 ,  H01L2224/83948 ,  H01L2224/9202 ,  H01L2224/92147 ,  H01L2224/95 ,  H01L2924/00014 ,  H01L2924/01322 ,  H01L2924/1461 ,  H01L2924/15787 ,  H01L2924/16235 ,  H01L2924/351 ,  H01L2924/00015 ,  H01L2224/83 ,  H01L2224/85 ,  H01L2224/81 ,  H01L2924/00012 ,  H01L2924/00 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

摘要： A substrate bonding method comprises the following steps. Firstly, a first substrate and a second substrate are provided, wherein a surface of the first substrate is covered by a first Ag layer and a surface of the second substrate is covered by a second Ag layer and a metallic layer from bottom to top, wherein the metallic layer comprises a first Sn layer. Secondly, a bonding process is performed by aligning the first and second substrates followed by bringing the metallic layer into contact with the first Ag layer followed by applying a load while heating to a predetermined temperature in order to form Ag3Sn intermetallic compounds. Finally, cool down and remove the load to complete the bonding process.

摘要翻译： 基板接合方法包括以下步骤。 首先，提供第一基板和第二基板，其中第一基板的表面被第一Ag层覆盖，并且第二基板的表面被从第二Ag层和从底部到顶部的金属层覆盖，其中 金属层包括第一Sn层。 其次，通过使第一和第二基板对准，然后使金属层与第一Ag层接触，然后在加热至预定温度的同时施加负载以形成Ag 3 Sn金属间化合物，进行接合工艺。 最后，冷却并清除负载以完成粘合过程。