公开(公告)号：US06443002B2

公开(公告)日：2002-09-03

申请号：US09812741

申请日：2001-03-20

Applicant: Austin R. Blew ,  Alexander Eidukonis

Inventor： Austin R. Blew ,  Alexander Eidukonis

IPC: G01L504

CPC classification number: H01L21/6732 ,  G01N21/86 ,  G01N21/958 ,  G01N35/00029 ,  H01L21/67253 ,  H01L21/67265 ,  H01L21/67363 ,  H01L21/67778

Abstract: An apparatus for testing of electrical, mechanical, physical and/or chemical properties of material in sheet form includes a cassette for holding of sheets and sensors rigidly mounted relative to the cassette. The sensors may be mounted adjacent a test location exterior to the cassette. The cassette and the sensors may be so configured and positioned that a suitable end effector may move sheets of material between storage locations in the cassette and test locations adjacent the sensors. A method for testing sheet material includes the steps of placing the sheet material in a cassette, and conducting tests employing one or more sensors rigidly mounted with respect to the cassette. The method may include employing an end effector to remove the sheet from the cassette, to position the sheet stepwise in several positions relative to the sensors, and to replace the sheet in the cassette upon completion of testing. Materials to be tested include flat panels for computer screens and other applications and semiconductor wafers.

Abstract translation: 用于测试片材形式的材料的电学，机械，物理和/或化学性质的装置包括用于保持相对于盒子刚性地安装的片材和传感器的盒。 传感器可以安装在盒子外部的测试位置附近。 盒和传感器可以如此配置和定位，使得合适的端部执行器可以在盒中的存储位置和邻近传感器的测试位置之间移动材料片。 用于测试片材的方法包括将片材放置在盒中的步骤，以及使用相对于盒子刚性地安装的一个或多个传感器进行测试的步骤。 该方法可以包括使用末端执行器从纸盒中移除纸张，以便将纸张相对于传感器逐步定位在多个位置，并且在测试完成时更换纸张。 要测试的材料包括用于计算机屏幕和其他应用的平板和半导体晶片。

公开(公告)号：US06711948B2

公开(公告)日：2004-03-30

申请号：US10234747

申请日：2002-09-03

Applicant: Austin R. Blew ,  Alexander Eidukonis

Inventor： Austin R. Blew ,  Alexander Eidukonis

IPC: G01L504

CPC classification number: H01L21/6732 ,  G01N21/86 ,  G01N21/958 ,  G01N35/00029 ,  H01L21/67253 ,  H01L21/67265 ,  H01L21/67363 ,  H01L21/67778

Abstract: An apparatus for testing of electrical, mechanical, physical and/or chemical properties of material in sheet form includes a cassette for holding of sheets and sensors rigidly mounted relative to the cassette. The sensors may be mounted adjacent a test location exterior to the cassette. The cassette and the sensors may be so configured and positioned that a suitable end effector may move sheets of material between storage locations in the cassette and test locations adjacent the sensors. A method for testing sheet material includes the steps of placing the sheet material in a cassette, and conducting tests employing one or more sensors rigidly mounted with respect to the cassette. The method may include employing an end effector to remove the sheet from the cassette, to position the sheet stepwise in several positions relative to the sensors, and to replace the sheet in the cassette upon completion of testing. Materials to be tested include flat panels for computer screens and other applications and semiconductor wafers.

Abstract translation: 用于测试片材形式的材料的电学，机械，物理和/或化学性质的装置包括用于保持相对于盒子刚性地安装的片材和传感器的盒。 传感器可以安装在盒子外部的测试位置附近。 盒和传感器可以如此配置和定位，使得合适的端部执行器可以在盒中的存储位置和邻近传感器的测试位置之间移动材料片。 用于测试片材的方法包括将片材放置在盒中的步骤，以及使用相对于盒子刚性地安装的一个或多个传感器进行测试的步骤。 该方法可以包括使用末端执行器从纸盒中移除纸张，以便将纸张相对于传感器逐步定位在多个位置，并且在测试完成时更换纸张。 要测试的材料包括用于计算机屏幕和其他应用的平板和半导体晶片。

公开(公告)号：US06202482B1

公开(公告)日：2001-03-20

申请号：US09316677

申请日：1999-05-21

Applicant: Austin R. Blew ,  Alexander Eidukonis

Inventor： Austin R. Blew ,  Alexander Eidukonis

IPC: G01L504

CPC classification number: H01L21/6732 ,  G01N21/86 ,  G01N21/958 ,  G01N35/00029 ,  H01L21/67253 ,  H01L21/67265 ,  H01L21/67363 ,  H01L21/67778

Abstract: An apparatus for testing of electrical, mechanical, physical and/or chemical properties of material in sheet form includes a cassette for holding of sheets and sensors rigidly mounted relative to the cassette. The sensors may be mounted adjacent a test location exterior to the cassette. The cassette and the sensors may be so configured and positioned that a suitable end effector may move sheets of material between storage locations in the cassette and test locations adjacent the sensors. A method for testing sheet material includes the steps of placing the sheet material in a cassette, and conducting tests employing one or more sensors rigidly mounted with respect to the cassette. The method may include employing an end effector to remove the sheet from the cassette, to position the sheet stepwise in several positions relative to the sensors, and to replace the sheet in the cassette upon completion of testing. Materials to be tested include flat panels for computer screens and other applications and semiconductor wafers.

公开(公告)号：US06205852B1

公开(公告)日：2001-03-27

申请号：US09274487

申请日：1999-03-23

Applicant: Austin R. Blew

Inventor： Austin R. Blew

IPC: G01L504

CPC classification number: H01L21/6732 ,  G01N21/86 ,  G01N21/958 ,  H01L21/67253 ,  H01L21/67265 ,  H01L21/67778

Abstract: An apparatus for testing of electrical, mechanical, physical and/or chemical properties of material in sheet form includes sensors which may be positioned adjacent to a surface of material in sheet form located in a cassette and supports positioned to reduce sag of the material. A method for testing sheet material includes the steps of placing the sheet material in a cassette, and testing the sheet material while in the cassette. A cassette includes shelves having defined therein test heads for testing properties of material in sheet form. Shelves may have test heads or sensors mounted in a lower surface thereof, which test heads or sensors cooperate with test heads or sensors mounted in the upper surface of the next lower shelf. Shelves may include test points that have multiple sensors that cooperate, such as by inductive coupling, to test the material. A robot end effector is dimensioned to contact a lower surface of material in a cassette and has test sensors defined therein for testing of properties of the material. Materials to be tested include flat panels for computer screens and semiconductor wafers.

Abstract translation: 用于测试片材形式的材料的电学，机械，物理和/或化学性质的装置包括可以位于与位于盒中的片材形式的材料表面相邻的传感器，并且支撑定位成减少材料的松弛。 用于测试片材的方法包括以下步骤：将片材放置在盒中，并在片盒中测试片材。 盒式磁带包括在其中限定的用于测试片材形式的性质的测试头的搁板。 搁板可以具有安装在其下表面中的测试头或传感器，测试头或传感器与安装在下一个下架的上表面中的测试头或传感器配合。 货架可以包括具有多个传感器的测试点，例如通过感应耦合来测试材料。 机器人端部执行器的尺寸被设计成接触盒中的材料的下表面并且在其中定义测试传感器以测试材料的性质。 要测试的材料包括用于计算机屏幕和半导体晶片的平板。