公开(公告)号：US20200066570A1

公开(公告)日：2020-02-27

申请号：US16549239

申请日：2019-08-23

Applicant: Axcelis Technologies, Inc.

Inventor： John Baggett ,  Dave Shaner

IPC: H01L21/687 ,  H01L21/67 ,  H01L21/683

Abstract: A workpiece support has a support surface where one or more standoffs are selectively removably coupled to the support surface. The one or more standoffs are operable to support a workpiece at a predetermined standoff distance from the support surface. A gap may be defined between the support surface and the workpiece. The one or more standoffs may be an electrically insulative film, such as a polyimide film that is selectively removably coupled to the support surface by an adhesive. The workpiece support may be an electrostatic chuck (ESC). Electrodes positioned below the support surface may electrostatically attract the workpiece toward the support, where a gas may be introduced in the gap.

公开(公告)号：US11114330B2

公开(公告)日：2021-09-07

申请号：US16549239

申请日：2019-08-23

Applicant: Axcelis Technologies, Inc.

Inventor： John Baggett ,  Dave Shaner

IPC: H01L21/687 ,  H01L21/67 ,  H01L21/683

Abstract: A workpiece support has a support surface where one or more standoffs are selectively removably coupled to the support surface. The one or more standoffs are operable to support a workpiece at a predetermined standoff distance from the support surface. A gap may be defined between the support surface and the workpiece. The one or more standoffs may be an electrically insulative film, such as a polyimide film that is selectively removably coupled to the support surface by an adhesive. The workpiece support may be an electrostatic chuck (ESC). Electrodes positioned below the support surface may electrostatically attract the workpiece toward the support, where a gas may be introduced in the gap.