公开(公告)号：US09064673B2

公开(公告)日：2015-06-23

申请号：US13915149

申请日：2013-06-11

Applicant: Axcelis Technologies, Inc.

Inventor： William Davis Lee ,  Kevin J. Hoyt ,  David Shanner ,  Jason Beringer

IPC: H01L21/673 ,  H01J37/20 ,  H01J37/317 ,  H01L21/687 ,  H01L21/683

CPC classification number: H01J37/20 ,  H01J37/3171 ,  H01J2237/08 ,  H01J2237/2007 ,  H01J2237/201 ,  H01L21/6831 ,  H01L21/68785 ,  Y10S901/31

Abstract: A workpiece carrier comprises a first plate having a first outer diameter, a first inner diameter, and a first recess extending a first distance from the first inner diameter toward the first outer diameter. The workpiece carrier further comprises a second plate having a second outer diameter, a second inner diameter, and a second recess extending a second distance from the second inner diameter toward the second outer diameter. A plurality of mating features associated with the first plate and second plate are configured to selectively fix a position of a first workpiece between the first plate and second plate within the first recess and second recess.

Abstract translation: 工件载体包括具有第一外径，第一内径和从第一内径向第一外径延伸第一距离的第一凹槽的第一板。 工件托架还包括具有第二外径，第二内径和从第二内径向第二外径延伸第二距离的第二凹槽的第二板。 与第一板和第二板相关联的多个配合特征被配置为在第一凹部和第二凹部内选择性地将第一工件的位置固定在第一板和第二板之间。

公开(公告)号：US20140361197A1

公开(公告)日：2014-12-11

申请号：US13915149

申请日：2013-06-11

Applicant: Axcelis Technologies, Inc.

Inventor： William Davis Lee ,  Kevin J. Hoyt ,  David Shanner ,  Jason Beringer

IPC: H01J37/20 ,  H01J37/317 ,  H01L21/683 ,  B23Q3/18

CPC classification number: H01J37/20 ,  H01J37/3171 ,  H01J2237/08 ,  H01J2237/2007 ,  H01J2237/201 ,  H01L21/6831 ,  H01L21/68785 ,  Y10S901/31

Abstract: A workpiece carrier comprises a first plate having a first outer diameter, a first inner diameter, and a first recess extending a first distance from the first inner diameter toward the first outer diameter. The workpiece carrier further comprises a second plate having a second outer diameter, a second inner diameter, and a second recess extending a second distance from the second inner diameter toward the second outer diameter. A plurality of mating features associated with the first plate and second plate are configured to selectively fix a position of a first workpiece between the first plate and second plate within the first recess and second recess.

Abstract translation: 工件载体包括具有第一外径，第一内径和从第一内径向第一外径延伸第一距离的第一凹槽的第一板。 工件托架还包括具有第二外径，第二内径和从第二内径向第二外径延伸第二距离的第二凹槽的第二板。 与第一板和第二板相关联的多个配合特征被配置为在第一凹部和第二凹部内选择性地将第一工件的位置固定在第一板和第二板之间。