VACUUM GAUGE STATE DETECTION METHOD AND SYSTEM

    公开(公告)号:US20170299458A1

    公开(公告)日:2017-10-19

    申请号:US15491150

    申请日:2017-04-19

    申请人: Azbil Corporation

    IPC分类号: G01L27/00 G01L21/00

    摘要: A state determination unit compares an output value obtained by a measuring unit with a reference characteristic value that serves as a reference, counts the number of times an excessive pressure application state occurs in which the output value is determined to be equal to or larger than the reference characteristic value, and determines whether the number of times reaches an upper limit that is set. An alarm output unit outputs an alarm when the state determination unit determines that the number of times the output value is equal to or larger than the reference characteristic value reaches the set upper limit.

    ELECTROSTATIC PRESSURE SENSOR
    4.
    发明申请
    ELECTROSTATIC PRESSURE SENSOR 审中-公开
    静电压力传感器

    公开(公告)号:US20140150559A1

    公开(公告)日:2014-06-05

    申请号:US14092065

    申请日:2013-11-27

    申请人: Azbil Corporation

    IPC分类号: G01L9/12

    摘要: An electrostatic pressure sensor includes a diaphragm, a sensor pedestal, a cover plate, a stationary electrode, and a movable electrode. The cover plate is bonded to an outer peripheral portion of the diaphragm on the opposite side from the sensor pedestal to form a pressure introduction chamber in cooperation with the diaphragm. The cover plate has a pressure introducing hole that introduces a medium to be measured into the pressure introduction chamber from a direction that is perpendicular to a surface of the diaphragm. The pressure introducing hole is arranged so as to be positioned in a range of between 50.0% and 70.0% from the center of the diaphragm along a direction of the surface of the diaphragm, when the radius of the diaphragm is defined as 100%.

    摘要翻译: 静电压力传感器包括隔膜,传感器基座,盖板,固定电极和可动电极。 盖板与隔膜的与传感器基座相反的一侧的外周部结合,与隔膜配合形成压力导入室。 盖板具有压力引入孔,该压力引入孔从垂直于隔膜表面的方向将待测介质引入压力导入室。 当膜片的半径被定义为100%时,压力引入孔被布置成从膜片的中心沿着膜片的表面的方向定位在50.0%和70.0%之间的范围内。

    SEDIMENT STATE ESTIMATING APPARATUS, SEDIMENT STATE ESTIMATING METHOD, AND SEDIMENT STATE ESTIMATING SYSTEM
    5.
    发明申请
    SEDIMENT STATE ESTIMATING APPARATUS, SEDIMENT STATE ESTIMATING METHOD, AND SEDIMENT STATE ESTIMATING SYSTEM 有权
    国家估算设备,国家估算方法和国家估算系统

    公开(公告)号:US20160282213A1

    公开(公告)日:2016-09-29

    申请号:US15076826

    申请日:2016-03-22

    申请人: Azbil Corporation

    IPC分类号: G01L27/00

    摘要: The state of sediment can be estimated based on an initial power supply frequency at which a diaphragm resonates in an initial state in which sediment is not accumulated and a power supply frequency at which the diaphragm resonates after the sediment is accumulated, the state of the sediment can be estimated even in a stage in which the sediment is slightly accumulated on the diaphragm and a zero-point shift does not occur.

    摘要翻译: 沉积物的状态可以基于在没有积聚沉积物的初始状态下隔膜共振的初始电源频率和在沉积物积聚之后隔膜共振的电源频率,沉积物的状态 即使在沉积物稍微积聚在隔膜上并且不发生零点漂移的阶段中也可以估计。

    ELECTROSTATIC CAPACITIVE PRESSURE SENSOR
    6.
    发明申请
    ELECTROSTATIC CAPACITIVE PRESSURE SENSOR 审中-公开
    静电电容式传感器

    公开(公告)号:US20150040674A1

    公开(公告)日:2015-02-12

    申请号:US14453684

    申请日:2014-08-07

    申请人: Azbil Corporation

    IPC分类号: G01L9/12

    CPC分类号: G01L19/0636 G01L9/0072

    摘要: An electrostatic capacitive pressure sensor includes: a housing having an inlet portion for a fluid; a sensor chip that detects, as a change in electrostatic capacitance, a change in a diaphragm that flexes upon receipt of a pressure of the fluid, which has entered through the inlet portion; and a baffle that prevents deposition, onto the diaphragm, of a contaminating substance included in the fluid, provided within a flow path of the fluid that is subject to measurement between the inlet portion and the diaphragm. The baffle has a cylindrical structure that is closed on one end, disposed with the direction that is perpendicular to a pressure-bearing surface of the diaphragm as the axial direction. A plurality of flow paths, in which the fluid passes between the inner peripheral surface and the outer peripheral surface of the cylindrical structure, is provided in multiple layers in the axial direction.

    摘要翻译: 静电电容式压力传感器包括:壳体,其具有用于流体的入口部分; 传感器芯片,其作为静电电容的变化检测在接收到通过入口部分进入的流体的压力时弯曲的隔膜的变化; 以及挡板,其防止在所述流体中包含的污染物质在所述隔膜上沉积,所述污染物质设置在所述入口部分和所述隔膜之间经受测量的流体的流动路径内。 挡板具有在一端封闭的圆柱形结构,其沿与轴向方向垂直于隔膜的承压表面的方向设置。 流体在圆筒形结构的内周面和外周面之间通过的多个流路沿轴向设置成多层。

    TRANSPORT DEVICE AND FREEZE-DRYING SYSTEM

    公开(公告)号:US20210016977A1

    公开(公告)日:2021-01-21

    申请号:US17043085

    申请日:2018-04-10

    申请人: Azbil Corporation

    发明人: Hidenobu TOCHIGI

    IPC分类号: B65G47/46 B65G47/53

    摘要: A transport device having a plate; a conveyor to transport articles; a pusher to push and move a row of articles on the conveyor onto the plate; and a stopper to prevent the articles from being moved by the conveyor and to define the start of a row of articles being moved onto the plate by the pusher. The conveyor causes the positions of rows of articles stopped by the stopper to move alternately so that the positions of rows of articles moved onto the plate are shifted alternately.

    PRESSURE SENSOR
    8.
    发明申请
    PRESSURE SENSOR 审中-公开

    公开(公告)号:US20190025146A1

    公开(公告)日:2019-01-24

    申请号:US16064229

    申请日:2016-11-07

    申请人: Azbil Corporation

    IPC分类号: G01L9/12

    摘要: Aiming to more easily perform calibration of a sensor output from a pressure sensor, the calibration being necessitated due to the occurrence of sedimentation, a resonance point measurement unit (122) measures a resonance point of a diaphragm (112) on the basis of the result obtained by performing measurement of a constant pressure using the pressure sensor while a power supply frequency is changed, a characteristic calculation unit (123) calculates, on the basis of the measured resonance point, an elastic modulus of the diaphragm (112) at the time of the measurement of the resonance point, and a correction unit (124) calculates a corrected sensor sensitivity resulting from correcting a sensor sensitivity of a sensor chip (101) on the basis of the elastic modulus calculated by the characteristic calculation unit (123).

    CONVEYED ARTICLE SORTING DEVICE
    9.
    发明申请

    公开(公告)号:US20210162466A1

    公开(公告)日:2021-06-03

    申请号:US17048182

    申请日:2018-04-20

    申请人: Azbil Corporation

    IPC分类号: B07C5/36 B65G47/82 B65G47/88

    摘要: This conveyed article sorting device is provided with: a conveyor 10 which conveys articles 5; a track 20 configured such that the articles 5 conveyed by the conveyer 10 can be transferred onto the track 20 from the conveyer 10; and a rotary gate 30 which can come into contact with the articles 5 on the conveyor 10, wherein, when an article 5 to be sampled is conveyed by the conveyor 10, the rotary gate 30 moves the article 5 to be sampled, from the conveyor 10 onto the track 20.

    INSPECTION SYSTEM
    10.
    发明申请

    公开(公告)号:US20210158505A1

    公开(公告)日:2021-05-27

    申请号:US17048215

    申请日:2018-04-20

    申请人: Azbil Corporation

    IPC分类号: G06T7/00 B65G47/84 B65G43/00

    摘要: An inspection system having a conveyor which conveys a plurality of articles; a feed screw which is disposed along the conveyor and which sets the interval between the plurality of articles to be greater than or equal to a predetermined interval; and an inspection device which inspects each of the plurality of articles spaced apart from each other at a constant interval by the feed screw.