摘要:
A base plate has pressure introducing holes at positions facing a diaphragm support portion. A thickness portion (thick portion) of the diaphragm support portion and a sensor base joined to the diaphragm support portion thus serves as a heat dissipating or absorbing portion and hinders the transfer of thermal energy of a measured medium to a sensor diaphragm.
摘要:
A pressure change measuring unit causes a temperature control unit to operate and vary the temperature of a sensor chip in a predetermined temperature range, and measures changes in pressure value output from the sensor chip whose temperature is being varied. A temperature characteristic calculating unit calculates a temperature characteristic of the sensor chip from changes in the temperature of the sensor chip caused by the operation of the temperature control unit and changes in pressure value measured by the pressure change measuring unit.
摘要:
A state determination unit compares an output value obtained by a measuring unit with a reference characteristic value that serves as a reference, counts the number of times an excessive pressure application state occurs in which the output value is determined to be equal to or larger than the reference characteristic value, and determines whether the number of times reaches an upper limit that is set. An alarm output unit outputs an alarm when the state determination unit determines that the number of times the output value is equal to or larger than the reference characteristic value reaches the set upper limit.
摘要:
An electrostatic pressure sensor includes a diaphragm, a sensor pedestal, a cover plate, a stationary electrode, and a movable electrode. The cover plate is bonded to an outer peripheral portion of the diaphragm on the opposite side from the sensor pedestal to form a pressure introduction chamber in cooperation with the diaphragm. The cover plate has a pressure introducing hole that introduces a medium to be measured into the pressure introduction chamber from a direction that is perpendicular to a surface of the diaphragm. The pressure introducing hole is arranged so as to be positioned in a range of between 50.0% and 70.0% from the center of the diaphragm along a direction of the surface of the diaphragm, when the radius of the diaphragm is defined as 100%.
摘要:
The state of sediment can be estimated based on an initial power supply frequency at which a diaphragm resonates in an initial state in which sediment is not accumulated and a power supply frequency at which the diaphragm resonates after the sediment is accumulated, the state of the sediment can be estimated even in a stage in which the sediment is slightly accumulated on the diaphragm and a zero-point shift does not occur.
摘要:
An electrostatic capacitive pressure sensor includes: a housing having an inlet portion for a fluid; a sensor chip that detects, as a change in electrostatic capacitance, a change in a diaphragm that flexes upon receipt of a pressure of the fluid, which has entered through the inlet portion; and a baffle that prevents deposition, onto the diaphragm, of a contaminating substance included in the fluid, provided within a flow path of the fluid that is subject to measurement between the inlet portion and the diaphragm. The baffle has a cylindrical structure that is closed on one end, disposed with the direction that is perpendicular to a pressure-bearing surface of the diaphragm as the axial direction. A plurality of flow paths, in which the fluid passes between the inner peripheral surface and the outer peripheral surface of the cylindrical structure, is provided in multiple layers in the axial direction.
摘要:
A transport device having a plate; a conveyor to transport articles; a pusher to push and move a row of articles on the conveyor onto the plate; and a stopper to prevent the articles from being moved by the conveyor and to define the start of a row of articles being moved onto the plate by the pusher. The conveyor causes the positions of rows of articles stopped by the stopper to move alternately so that the positions of rows of articles moved onto the plate are shifted alternately.
摘要:
Aiming to more easily perform calibration of a sensor output from a pressure sensor, the calibration being necessitated due to the occurrence of sedimentation, a resonance point measurement unit (122) measures a resonance point of a diaphragm (112) on the basis of the result obtained by performing measurement of a constant pressure using the pressure sensor while a power supply frequency is changed, a characteristic calculation unit (123) calculates, on the basis of the measured resonance point, an elastic modulus of the diaphragm (112) at the time of the measurement of the resonance point, and a correction unit (124) calculates a corrected sensor sensitivity resulting from correcting a sensor sensitivity of a sensor chip (101) on the basis of the elastic modulus calculated by the characteristic calculation unit (123).
摘要:
This conveyed article sorting device is provided with: a conveyor 10 which conveys articles 5; a track 20 configured such that the articles 5 conveyed by the conveyer 10 can be transferred onto the track 20 from the conveyer 10; and a rotary gate 30 which can come into contact with the articles 5 on the conveyor 10, wherein, when an article 5 to be sampled is conveyed by the conveyor 10, the rotary gate 30 moves the article 5 to be sampled, from the conveyor 10 onto the track 20.
摘要:
An inspection system having a conveyor which conveys a plurality of articles; a feed screw which is disposed along the conveyor and which sets the interval between the plurality of articles to be greater than or equal to a predetermined interval; and an inspection device which inspects each of the plurality of articles spaced apart from each other at a constant interval by the feed screw.