公开(公告)号：US20160343933A1

公开(公告)日：2016-11-24

申请号：US15034346

申请日：2014-10-30

Applicant: BASF SE

Inventor： Michael BAECKER ,  Martina FALTER ,  Jan BENNEWITZ ,  Christoph STEINBERG ,  Christian WERNER

IPC: H01L39/12 ,  C09D11/36 ,  H01L39/24 ,  C04B35/622 ,  C04B35/632 ,  C09D11/52 ,  C04B35/45

CPC classification number: H01L39/126 ,  C04B35/4508 ,  C04B35/62218 ,  C04B35/6325 ,  C04B2235/3205 ,  C04B2235/3215 ,  C04B2235/3225 ,  C04B2235/3282 ,  C04B2235/449 ,  C04B2235/656 ,  C04B2235/6586 ,  C04B2235/6588 ,  C09D11/36 ,  C09D11/52 ,  C23C18/1216 ,  C23C18/1279 ,  C23C18/1283 ,  H01L39/2425

Abstract: The present invention deals with precursor composition for alkaline earth metal containing ceramic layers. In particular, the present invention pertains to a precursor composition containing:(i) one or more soluble compounds of transition metals (ii) one or more soluble compounds of alkaline earth metals (iii) one or more soluble compounds of rare earth metals (iv) difluorinated carboxylate and/or partly fluorinated propionates (v) one or more solvents, wherein the difference between the boiling points of the corresponding acid of the components (i) to (iii) to the boiling point of component (iv) is less than 60 K.

Abstract translation: 本发明涉及含有碱土金属的陶瓷层的前体组合物。 特别地，本发明涉及一种前体组合物，其包含：（i）一种或多种可溶性过渡金属化合物（ii）一种或多种可溶性碱土金属化合物（iii）一种或多种可溶性稀土金属化合物（iv ）二氟化羧酸盐和/或部分氟化丙酸盐（v）一种或多种溶剂，其中组分（i）至（iii）的相应酸的沸点与组分（iv）的沸点之间的沸点之间的差小于 60 K.