公开(公告)号：US20180066159A1

公开(公告)日：2018-03-08

申请号：US15557620

申请日：2016-03-17

Applicant: BASF SE

Inventor： Ari KARKKAINEN ,  Milja HANNU-KUURE ,  Admir HADZIC ,  Jarkko LEIVO ,  Henna JARVITALO ,  Rauna-Leena KUVAJA ,  Graeme GORDON ,  Matti PESONEN

IPC: C09D183/14 ,  G03F7/038 ,  G03F7/075

CPC classification number: C09D183/14 ,  C08G77/14 ,  C08G77/20 ,  C08G77/50 ,  C08G77/52 ,  G03F7/038 ,  G03F7/075 ,  G03F7/0757

Abstract: The present invention relates to siloxane polymer compositions. In particular, the invention relates to siloxane polymer compositions which have suitable properties for use in a lithographic fabrication processes. The invention also relates to synthesis, polymerization and cross-linking of such compositions.